Experimental Study of Electrical‑Assisted Nanomachining of Monocrystalline Copper Using Customized Tungsten Tip  

作　　者：Tao Wang Yanling Tian Zhilai Lu Weijie Wang Zhao Zhang Guangwei Zhu Hui Tang Dawei Zhang 

机构地区：[1]Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education,Tianjin University,Tianjin 300072,China [2]School of Engineering,University of Warwick,Coventry CV47AL,UK [3]State Key Laboratory of High Performance Complex Manufacturing,Central South University,Changsha 410083,China [4]State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China

出　　处：《Nanomanufacturing and Metrology》2024年第2期60-75,共16页纳米制造与计量（英文）

基　　金：financial support from National Natural Science Foundation of China(52075364,52205506);the Project of State Key Laboratory of Precision Manufacturing for Extreme Service Performance,Central South University(ZZYJKT2023-09);the Guangdong International Cooperation Program of Science and Technology(2022A0505050078);the Open Fund of State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology(JMDZ2021001).

摘　　要：As a promising micro/nanofabrication method,electrical-assisted nanomachining has obtained substantial attention due to its high material removal rate and attainable superior surface quality.In this study,a rectangular wave electrical signal was applied for nanomachining by a customized tungsten tip.Owing to the coupling effect between the electric field and mechanical force,the cutting depth of the machined grooves can be expanded.In electrical-assisted groove processing,a depth of 270 nm and an aspect ratio of 0.6 on the copper sample can be achieved.The influence of operation parameters including applied voltage,frequency,duty ratio,normal force and cutting speed on the machining performance was investigated in terms of the groove depth,width,aspect ratio,and surface roughness.The potential machining mechanisms should be a combination of electric field force,nanoscale electric discharge,electric contact thermal effects,possible annealing behavior,and scraping and plowing actions induced by mechanical forces.

关 键 词：Tip-based nanofabrication Electrical-assisted machining Nanoscale scratching Machining parameters 

分 类 号：TG146.11[一般工业技术—材料科学与工程] TB383[金属学及工艺—金属材料]