ITO靶材烧结用垫片自动磨床设计研究  

Design study of automatic grinding machine for ITO target sintering pads

作　　者：赖玉活 陈荣智 林伟健 黄应欢 LAI Yuhuo;CHEN Rongzhi;LIN Weijian;HUANG Yinghuan(Faculty of Mechanical and Automotive Engineering,Guangxi University of Science and Technology,Liuzhou 545006,CNH;Faculty of Mechanical Engineering,Liuzhou Institute of Technology,Liuzhou 545616,CHN;Nexteer Automotive System(Liuzhou)Co.,Ltd.,Liuzhou 545000,CHN)

机构地区：[1]广西科技大学机械与汽车工程学院,广西柳州545006 [2]柳州工学院机械工程学院,广西柳州545616 [3]耐世特汽车系统(柳州)有限公司,广西柳州545000

出　　处：《制造技术与机床》2024年第8期105-112,共8页Manufacturing Technology & Machine Tool

基　　金：广西高校中青年教师科研基础能力提升项目“高世代用ITO靶材自动磨削机的研究与设计”(2021KY1707);柳州市重大专项研发项目“高世代面板用ITO靶材的研发及产业化”(2019BB20603)。

摘　　要：针对ITO靶材烧结用垫片生产成本高、效率低、质量差的难题,设计了一款加工该垫片的自动磨床。通过研究其功能需求,确定磨削方式,进行了总体、机构设计。结构设计通过集成创新方式设计了新颖的分料、上料、磨削、下料、砂轮修整、除尘、清洁及安全等机构,并对其进行可靠性计算及实验验证。该自动磨床设计巧妙,结构简单,安全高效,实现了垫片自动化加工,已应用于生产中,效果显著。Aiming at the difficulties of high production cost,low efficiency and poor quality of pads for ITO target sintering,an automatic grinder for processing these pads is designed.The overall and mechanism design is carried out by studying its functional requirements and determining the grinding mode.The structural design designs the novel mechanisms of dividing,loading,grinding,unloading,grinding wheel dressing,dust removal,cleaning and safety through the integrated innovation method,and carries out the reliability calculation and experimental verification.Ingenious in design,simple in structure,safe and efficient,the automatic grinder realises the automated processing of gaskets and has been used in production with remarkable results.

关 键 词：ITO靶材 自动磨床 结构设计 可靠性分析 

分 类 号：TH162[机械工程—机械制造及自动化] TH122