基于低温积分球的中红外陷阱探测器技术  

Mid-infrared trap detector technology based on cryogenic integrating sphere

作　　者：杨晓阳[1] 申曼玲 王大辉[2] 杨鹏翎[2] 李向阳[1] YANG Xiaoyang;SHEN Manling;WANG Dahui;YANG Pengling;LI Xiangyang(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Institute of Northwest Nuclear Technology,Xi'an 710024,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]西北核技术研究院,陕西西安710024

出　　处：《应用光学》2024年第4期685-692,共8页Journal of Applied Optics

基　　金：国家自然科学基金重点项目(42330110)。

摘　　要：针对中波红外辐射测量定标的需求,提出了将微型积分球与中红外探测器集成在低温环境中。验证比对了几种用于制作积分球内腔表面的材料样品,通过宽光谱反射率、特征光谱反射率、双向反射分布函数(bidirectional reflectance distribution function,BRDF),以及用激光共聚焦显微镜、扫描电子显微镜(scanning electron microscope,SEM)等进行微观表面形貌的测量,获得了适用于制作中红外积分球的内腔表面制作工艺。BRDF测试结果显示,制作的内腔表面接近朗伯反射表面。测试了积分球探测器样品的光谱与电学性能,经过表面粗糙化处理并蒸镀金属反射膜,样品的光谱波段适应性好,光强衰减比为0.0674,经计算,积分球内腔壁的反射率为96.4%;同时,低温积分球的引入,使探测器芯片的噪声由3.5×10^(-12)A·Hz^(-1/2)降低至1.0×10^(-12)A·Hz^(-1/2)。To meet the requirements of mid-wave infrared radiation measurement and calibration,the micro integrating sphere and mid-infrared detector were integrated in cryogenic environment.Several samples used to make the inner cavity surface of the integrating sphere were verified and compared.Through the measurement of broad-spectrum reflectivity,characteristic spectrum reflectivity,bidirectional reflectance distribution function(BRDF),laser confocal microscope,scanning electron microscope(SEM)and other micro-surface morphologies,the inner cavity surface fabrication process suitable for making the mid-infrared integrating sphere was obtained.The BRDF test results show that it is close to the Lambert reflection surface.The spectral and electrical properties of the integrating sphere detector sample were tested.The spectral band of the sample after surface roughening treatment and evaporation of metal reflection film has good adaptability,the light intensity attenuation ratio is 0.0674,and the reflectivity of the inner cavity wall of integrating sphere is 96.4%by calculation.At the same time,the introduction of the cryogenic integrating sphere reduces the noise of the detector chip from 3.5×10^(-12)A·Hz^(-1/2)to 1.0×10^(-12)A·Hz^(-1/2).

关 键 词：积分球 漫反射 陷阱探测器 中红外探测器 

分 类 号：TN215[电子电信—物理电子学]