一种可调焦离轴两反光学系统精密调校工艺技术研究  

Research on precision calibration technology for focusable off-axis two-mirror optical system

作　　者：张向明[1] 吴奉泽 赵红军[1] 惠刚阳[1] 杨熊 刘伟光[1] 李月贵 王诚[1] ZHANG Xiangming;WU Fengze;ZHAO Hongjun;HUI Gangyang;YANG Xiong;LIU Weiguang;LI Yuegui;WANG Cheng(Xi'an Institute of Applied Optics,Xi'an 710065,China)

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2024年第4期858-864,共7页Journal of Applied Optics

基　　金：空军某重点预研课题。

摘　　要：针对可调焦离轴两反光学系统的精密装调,提出了一种共基准调校方法,使导轨导向与主镜和次镜光轴均以同一基准进行精确调校,实现导轨运动轴线与主镜和次镜光轴平行。主镜、次镜系统光轴一致性调试采用初调整和精调整两步完成,初调整实现主镜和次镜基本位于理论安装位置,降低装调误差,然后进行计算机辅助装调,实现主镜和次镜光轴一致性精调整,使系统波像差满足要求。实验结果表明:无穷远处系统波像差RMS达到(1/15)λ(λ=632.8 nm),系统衍射分辨率达到0.64″,系统调焦至10 mm处,实测主镜、次镜系统所成焦距为1608 mm,系统分辨率为2.6″,达到设计要求。A common reference calibration method was proposed for the precision alignment of off-axis two-mirror optical systems with adjustable focus,which ensured that the guide rail and the optical axis of the primary and secondary mirrors were precisely aligned with the same reference,and realized the parallel movement axis of the guide rail and the optical axis of the primary and secondary mirrors.The consistency debugging of the optical axis was completed through two parts:initial adjustment and fine adjustment.The initial adjustment realized that the primary and secondary mirrors were basically located in the theoretical installation position,reducing the adjustment errors.Then,the computer-aided adjustment was performed to achieve precise adjustment of optical axis consistency of the primary and secondary mirrors,so that the system wave aberration met the requirements.The experimental results show that the wave aberration root mean square(RMS)of the infinitely distant system reaches(1/15)λ(λ=632.8 nm),the system has a diffraction resolution of 0.64",and the system is focused to 10 mm.The measured focal length of the primary and secondary mirror system is 1608 mm,and the system resolution reaches 2.6",which meets the design requirements.

关 键 词：离轴两反光学系统 调焦 共基准 波像差 

分 类 号：TN206[电子电信—物理电子学]