草状氧化铝微结构渐变折射率的计算及实验研究  

Calculation and Experimental Study on the Gradient Refractive Index of Grass Shaped Alumina Microstructure

作　　者：付秀华[1,2] 苏久麟 潘永刚[2,3] 王奔 林兆文 张功 孙文瀚 FU Xiuhua;SU Jiulin;PAN Yonggang;WANG Ben;LIN Zhaowen;ZHANG Gong;SUN Wenhan(School of Optoelectronic Engineering,Changchun University of Technology,Changchun 130022,China;Zhongshan Research Institute of Changchun University of Technology,Zhongshan 528437,China;Zhongshan Jilian Optoelectronic Technology Co.,Ltd.,Zhongshan 528437,China)

机构地区：[1]长春理工大学光电工程学院,长春130022 [2]长春理工大学中山研究院,中山528437 [3]中山吉联光电科技有限公司,中山528437

出　　处：《光子学报》2024年第7期217-226,共10页Acta Photonica Sinica

基　　金：国家自然科学基金(No.11973040),中山市社会公益科技研究项目(No.2022B2005),长春市激光智造与检测装备科技创新中心长科技合(No.2014219)。

摘　　要：针对草状氧化铝的微纳结构对折射率的影响,采用台体计算法与柱体计算法计算氧化铝的体积,使用Clausius-Mossotti方程式与MATLAB软件拟合计算微纳结构的折射率变化,使用TFC软件进行拟合,最终计算出草状氧化铝的渐变折射率,研究其微结构的形貌特征及渐变折射率的分布,计算其可见光减反射性能。采用电子束沉积氧化铝薄膜,通过对沉积温度、水煮工艺等参数的优化,获得了不同结构的草状氧化铝纳米薄膜,制备了可见光波段420~680 nm的减反射薄膜。Grass shaped alumina is a nano thin film with extremely low refractive index,which can also have good anti reflection effect when incident at large angles.In recent years,it has been increasingly widely used in consumer electronics fields such as automotive,monitoring,and mobile phones.This article focuses on the influence of the micro/nano structure of grass shaped alumina on the refractive index.The volume of alumina is calculated using both the table calculation method and the column calculation method.In order to improve calculation efficiency and accuracy,a higher thickness table calculation method is used on the outer side of the film,and a smaller thickness column calculation method is used on the inner side of the film.The Clausius Mossotti equation is used to calculate the mixed dielectric film layer of alumina and air.A gradient refractive index model of grass shaped alumina was constructed,and the morphology characteristics of its microstructure and distribution of gradient refractive index were studied,and its visible light antireflection performance was calculated.By using electron beam deposition of alumina thin films and optimizing parameters such as deposition temperature and water boiling process,grass shaped alumina nanofilms with different structures were obtained.The visible light band 420~680 nm antireflection film was prepared.Finally,under the conditions of deposition temperature 150℃,water boiling time 10 minutes,and water boiling temperature 90℃,an antireflection film layer with an average reflectivity of less than 0.5%in the visible light band was prepared,and JPK software and MATLAB software were used to perform hierarchical analysis and simulation fitting on the grass like micro/nano structure.TFC software was used to perform spectral analysis on the gradient refractive index results.The final simulation results still have some differences from the measured results,and the main reason for the error may be the light scattering caused by the non-uniformity of the grass like microstru

关 键 词：草状氧化铝 渐变折射率 折射率计算 减反射膜 分层介质理论 

分 类 号：O484[理学—固体物理]