基于氖原子谱线灯的单色仪波长误差标定的不确定度分析  

Uncertainty Analysis of Wavelength Error Calibration for Monochromators Based on Neon Atomic Spectral Lamps

作　　者：车德路 张佳雯 张婷婷 王高[1] 卢小丰[2] 王丙寅 赵艳栋 CHE Delu;ZHANG Jiawen;ZHANG Tingting;WANG Gao;LU Xiaofeng;WANG Bingyin;ZHAO Yandong(North University of China,Taiyuan 030051,China;National Institute of Metrology,Beijing 100029,China;HeBei University,Baoding 071002,China;Inner Mongolia Power Machinery Institute,Huhhot 010010,China)

机构地区：[1]中北大学,太原030051 [2]中国计量科学研究院,北京100029 [3]河北大学,保定071002 [4]内蒙动力机械研究所,呼和浩特010010

出　　处：《计量科学与技术》2024年第6期64-70,共7页Metrology Science and Technology

基　　金：国家科技重大专项(J2019-V-0015-0110);质量技术基础能力建设项目(ANL2007)。

摘　　要：单色仪作为分光设备,在光电高温计光谱响应度标定系统中实现将复合光源分为单色光。在实际应用过程中,为提升光电高温计在温标延伸和复现过程中的不确定度水平,对辐射测温三种常用滤波片660 nm、800 nm和900 nm光电高温计,在响应度实验前对单色仪输出单色光的波长准确性进行标定。采用氖原子谱线灯作为标准光源,通过光谱分析仪扫描其在600~1200 nm范围内的特征谱线,挑选37条合适的特征谱线对单色仪输出波长准确性进行标定。针对标定结果分别分析了环境温度、单色仪狭缝宽度、波长修正方法、探测器响应、非线性以及标定重复性等波长误差影响因素。结果表明,单色仪在900 nm波长误差的不确定度最大为0.033 nm。对常用660 nm滤波片的光电高温计,评估单色仪波长输出不确定度,对其在1084.62℃和3000℃的测温不确定度分别为0.01℃和0.28℃。As a spectroscopic instrument,the monochromator is used to separate mixed light into monochromatic light in the spectral responsivity calibration system of photoelectric pyrometers.To improve the uncertainty level of temperature scale extension and reproduction for photoelectric pyrometers,it is necessary to calibrate the wavelength accuracy of the monochromator output before the responsivity experiment for three commonly used photoelectric pyrometers with 660 nm,800 nm,and 900 nm filters.In this paper,a neon atomic spectral lamp is used as a standard light source,and a spectrum analyzer is used to scan its characteristic spectral lines in the range of 600-1200 nm.Thirty-seven suitable characteristic spectral lines are selected to calibrate the wavelength accuracy of the monochromator output.The influence factors of wavelength error,such as ambient temperature,monochromator slit width,wavelength correction method,detector response,nonlinearity,and calibration repeatability,are analyzed based on the calibration results.The results show that the maximum uncertainty of the wavelength error of the monochromator at 900 nm is 0.033 nm.For the photoelectric pyrometer with a commonly used 660 nm filter,when assessing the uncertainty of the monochromator wavelength output,the temperature measurement uncertainties at 1084.62°C and 3000°C are 0.01°C and 0.28°C,respectively.

关 键 词：计量学 光谱分析仪 单色仪 谱线灯 波长校准 不确定度 

分 类 号：TB96[机械工程—光学工程]