非平衡压缩实现高灵敏度、线性响应协同的离电压力传感器  

Non-equilibrium compression achieving high sensitivity and linearity for iontronic pressure sensors

作　　者：杨静 李志斌 伍莹 沈勇 张明 陈彬 袁国江 肖松华 冯建松 张旭 唐毓蔚 丁孙安 陈晓龙 王太宏 Jing Yang;Zhibin Li;Ying Wu;Yong Shen;Ming Zhang;Bin Chen;Guojiang Yuan;Songhua Xiao;Jiansong Feng;Xu Zhang;Yuwei Tang;Sunan Ding;Xiaolong Chen;Taihong Wang(Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen 518055,China;School of Microelectronics,Southern University of Science and Technology,Shenzhen 518055,China;Key Laboratory for Micro/Nano Optoelectronic Devices of Ministry of Education,Engineering Research Center of Advanced Semiconductor Technology and Application of Ministry of Education,Changsha Semiconductor Technology and Application Innovation Research Institute,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China;School of Environmental and Chemical Engineering,Yanshan University,Qinhuangdao 066004,China;School of Integrated Circuits,Nanjing University,Suzhou 215163,China)

机构地区：[1]Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen 518055,China [2]School of Microelectronics,Southern University of Science and Technology,Shenzhen 518055,China [3]Key Laboratory for Micro/Nano Optoelectronic Devices of Ministry of Education,Engineering Research Center of Advanced Semiconductor Technology and Application of Ministry of Education,Changsha Semiconductor Technology and Application Innovation Research Institute,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China [4]School of Environmental and Chemical Engineering,Yanshan University,Qinhuangdao 066004,China [5]School of Integrated Circuits,Nanjing University,Suzhou 215163,China

出　　处：《Science Bulletin》2024年第14期2221-2230,共10页科学通报（英文版）

基　　金：supported by Guangdong Major Talent Project(2019CX01X014,and 2019QN01C177)。

摘　　要：Flexible pressure sensors with high sensitivity and linearity are highly desirable for robot sensing and human physiological signal detection.However,the current strategies for stabilizing axial microstructures(e.g.,micro-pyramids)are mainly susceptible to structural stiffening during compression,thereby limiting the realization of high sensitivity and linearity.Here,we report a bending-induced nonequilibrium compression process that effectively enhances the compressibility of microstructures,thereby crucially improving the efficiency of interfacial area growth of electric double layer(EDL).Based on this principle,we fabricate an iontronic flexible pressure sensor with vertical graphene(VG)array electrodes.Ultra-high sensitivity(185.09 kPa^(-1))and linearity(R^(2)=0.9999)are realized over a wide pressure range(0.49 Pa–66.67 k Pa).It also exhibits remarkable mechanical stability during compression and bending.The sensor is successfully employed in a robotic gripping task to recognize the targets of different materials and shapes based on a multilayer perception(MLP)neural network.It opens the door to realizing haptic sensing capabilities for robotic hands and prosthetic limbs.

关 键 词：Artificial mechanoreceptor Pressure sensor Vertical grapheme Ionic nanofiber Object recognition E-skin 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]