闭腔型氧泵测氧芯片结构参数对特征时间t_(d)的影响研究  

Study on the Influence of Structure Parameters on Characteristic Time of t_(d) of Oxygen Measurement Chip of Closed-Cavity Oxygen Pump

作　　者：朱旭 谢光远[1] 杨开武 廖清林 吕俊涛 王典 ZHU Xu;XIE Guangyuan;YANG Kaiwu;LIAO Qinglin;LÜJuntao;WANG Dian(College of Material and Metallurgy,Wuhan University of Science and Technology,Wuhan Hubei 430081,China;Hubei Jinggui Zirconium Industry Co.,Ltd.,Yingcheng Hubei 432499,China)

机构地区：[1]武汉科技大学材料与冶金学院,湖北武汉430081 [2]湖北精圭锆业有限公司,湖北应城432499

出　　处：《传感技术学报》2024年第7期1120-1125,共6页Chinese Journal of Sensors and Actuators

基　　金：湖北省科技计划项目(2022BEC011)。

摘　　要：为了探究闭腔型测氧芯片结构参数对氧传感器特征时间t_(d)的影响,指导结构改进,优化氧传感器工作性能,采用控制变量法设计了四种不同结构的泵氧芯片并搭配自制的氧传感器进行测试,测量在不同氧气浓度下的t_(d)值,对曲线进行分析,并与推导出的理论关联式进行比较。结果表明,当泵氧芯片增加多孔氧化锆保护层后,提升了空腔的密封性,t_(d)与氧气浓度呈良好的线性关系;使用交叉型铂电极的泵氧芯片,泵电极与氧气的接触面积更大,泵氧速率更快,其t_(d)值更小。综合来说,优选芯片结构为添加多孔氧化锆保护层同时使用交叉电极的泵氧芯片,相比于对照产品,其t_(d)与氧气浓度具有更好的线性相关性,且制造成本低,并拥有与对照产品相近的t_(d)值,从而自主研发出具有良好工作性能的工业氧传感器。To explore the influence of the structural parameters of the closed-cavity oxygen sensor on the characteristic time of t_(d) of the oxygen sensor,guide the improvement of the structure and optimize the working performance of the oxygen sensor,four kinds of pump oxygen chips with different structures are designed by using the control variable method and tested with self-made oxygen sensors.The t_(d) values at different oxygen concentrations are measured,and the curves are analyzed and compared with the derived theoretical correlations of characteristic time of t_(d) and oxygen partial pressure.The experimental results show that when the porous zirconia protective layer is added to the pump oxygen chip,the sealing of the cavity is improved,and t_(d) has a good linear relationship with the oxygen concentration.The pump oxygen chip with cross platinum electrode has a larger contact area with oxygen,faster pump oxygen rate and smaller t_(d) value.In summary,the preferred chip structure is a pump oxygen chip with a porous zirconia protective layer and a cross-electrode.Compared with the control product,the t_(d) has a better linear correlation with the oxygen concentration,and the manufacturing cost is low,the t_(d) value is similar to the control product.

关 键 词：氧传感器 氧化锆 特征时间 铂电极 结构参数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]