基于机器视觉技术的高精度光学仪器表面动态变形测量研究  

Research on high precision optical instrument surface dynamic deformation measurement based on machine vision technology

作　　者：张燕[1] 史汝川 ZHANG Yan;SHI Ruchuan(College of Information Engineering,Nanyang Institute of Technology,Nanyang Henan 473004,China;College of Perception Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China)

机构地区：[1]南阳理工学院信息工程学院,河南南阳473004 [2]上海交通大学感知科学与工程学院,上海200240

出　　处：《激光杂志》2024年第7期271-275,共5页Laser Journal

基　　金：河南省科技攻关项目(No.22102210206)。

摘　　要：伴随着光学仪器精度的逐渐提高,其表面动态变形事件发生频率也呈现急剧增加的趋势,是影响与制约光学仪器发展与应用的主要因素之一。为了满足光学仪器的应用需求,提出基于机器视觉技术的高精度光学仪器表面动态变形测量方法。采用机器视觉设备获取高精度光学仪器表面图像,对表面图像进行灰度化处理、去噪处理与增强处理,以此为基础,应用SURF特征检测算法提取表面图像的特征点,通过FLANN算法匹配相邻图像的特征点,利用Delaunay三角化在表面图像区域形成三角网格,进一步计算表面图像特征点的位移与应变,从而实现高精度光学仪器表面动态变形的测量。实验数据显示:在横坐标为1μm时,应用提出方法获得的表面动态变形位移纵坐标为1.8μm,与实际位移基本保持一致,在实验组别为6时,应用提出方法获得的光学仪器表面动态变形应变数值为3μm,与实际应变数值保持一致,充分证实了提出方法具备较好的应用性能。With the gradual improvement of optical instrument accuracy,the frequency of surface dynamic deformation events also shows a sharp increase trend,which is one of the main factors affecting and restricting the development and application of optical instruments.In order to meet the application requirements of optical instruments,a high-precision surface dynamic deformation measurement method for optical instruments based on machine vision technology is proposed.Using machine vision equipment to obtain high-precision optical instrument surface images,the surface images are grayed out,denoised,and enhanced.Based on this,the SURF feature detection algorithm is applied to extract the feature points of the surface image.The FLANN algorithm is used to match the feature points of adjacent images,and Delaunay triangulation is used to form a triangular mesh in the surface image area to further calculate the displacement and strain of the feature points of the surface image,Thus achieving high-precision measurement of surface dynamic deformation of optical instruments.Experimental data show that:When the horizontal coordinate is 1μm,the vertical coordinate of the surface dynamic deformation displacement obtained by the proposed method is 1.8μm,which is basically consistent with the actual displacement.When the experimental group is 6,the surface dynamic deformation strain value obtained by the proposed method is 3μm,which is consistent with the actual strain value,which fully proves that the proposed method has good application performance.

关 键 词：动态变形 高精度光学仪器 变形测量 机器视觉技术 仪器表面 表面图像 

分 类 号：TN929[电子电信—通信与信息系统]