简述半导体代工厂水系统的控制要求  

Request on Control about Facility Water System in Semiconductor Foundry

作　　者：张云秀 Zhang Yunxiu(Semiconductor Manufacturing International(Shanghai)Corp.,Shanghai 201203,China)

机构地区：[1]中芯国际集成电路制造(上海)有限公司,上海201203

出　　处：《皮革制作与环保科技》2024年第14期125-127,共3页Leather Manufacture and Environmental Technology

摘　　要：根据长期的运转经验,更多地考虑水系统顺畅运行和提供更大范围的后备方案是半导体代工厂水控制系统的发展方向。在此基础上,作者列举了业内在这方面所采取的措施,大到整体架构,小到如何设置警报。Thinking more about smoothly running and more backup solutions are the development direction of control part in water system from long term of semiconductor running experience.Based on it,the author listed the methods used in industry.Some as big as control system structure,some as tiny as how to set alarms.

关 键 词：半导体 可编程逻辑控制器 分布式控制系统 中央处理器 自动转换开关电器 静态转换开关 比例积分微分 监视控制与数据采集系统 

分 类 号：TS5[轻工技术与工程—皮革化学与工程]