不同延时条件下基于激光诱导击穿光谱的烧结混合料定量检测  

Quantitative detection of sintered mixed materials using LIBS under different delay conditions

作　　者：秦云鹏[1] 隋明达 魏自浩 薛世龙 卢渊[1] 田野[1] 郭金家[1] QIN Yunpeng;SUI Mingda;WEI Zihao;XUE Shilong;LU Yuan;TIAN Ye;GUO Jinjia(Faculty of Information Science and Engineering,Ocean University of China,Qingdao 266100,China)

机构地区：[1]中国海洋大学信息科学与工程学部,山东青岛266100

出　　处：《光学精密工程》2024年第13期2052-2060,共9页Optics and Precision Engineering

基　　金：山东省崂山实验室专项基金资助项目(No.LSKJ202203603);国家重点研发计划资助项目(No.2023YFC2811700);山东省自然科学基金资助项目(No.ZR2020MF123,No.ZR2023YQ059);国家自然科学基金资助项目(No.12174359)。

摘　　要：烧结混合料是烧结工艺中极为重要的一环,其成分检测的准确性直接影响烧结过程,激光诱导击穿光谱技术通过激光光谱分析烧结混合料中的元素成分和含量,实时性好,但定量检测效果相比于其他实验室方法仍有差距。研发了一套遥测激光诱导击穿光谱装置,并应用于烧结混合料成分检测,采用PLSR与PCA相结合的方法对烧结混合料中TFe,CaO,SiO_(2),MgO进行定量检测。通过对1.28μs和5μs不同延时的光谱数据计算发现,不同物质在不同探测延时条件下R_(2)有着明显差异,对于SiO_(2)和MgO这两种浓度相对较低的物质,采用较小的1.28μs探测延时,R_(2)分别达到了0.937和0.985,而浓度相对较高的TFe,CaO则采用更大的5μs探测延时效果更好,较采用1.28μs延时,TFe定量结果的R^(2)从0.903提高到0.987,CaO的R^(2)也从0.816提高到0.980。针对不同物质采用不同探测延时的方法显著提高了检测准确性,简化了检测流程,对烧结工艺起到指导作用。Sintered mixed materials are essential to the sintering process,and the precision of their compo⁃nent detection significantly influences outcomes.LIBS technology utilizes laser spectroscopy to analyze the elemental composition and concentration of these materials,offering real-time data.However,its quantita⁃tive detection capabilities still fall short compared to other laboratory methods.This study introduced a re⁃mote sensing LIBS device for detecting components in sintered mixed materials.By combining Partial Least Squares Regression(PLSR)and Principal Component Analysis(PCA),it quantitatively assessed TFe,CaO,SiO_(2),and MgO concentrations.Analysis of spectral data with delay times of 1.28μs and 5μs showed notable differences in R^(2)values for various substances.For low-concentration SiO_(2)and MgO,the 1.28μs delay yielded R^(2)values of 0.937 and 0.985,respectively.Conversely,a 5μs delay produced better results for higher concentrations,with TFe′s R^(2)increasing from 0.903 to 0.987 and CaO′s from 0.816 to 0.980.This approach enhanced detection accuracy by utilizing optimal delay times for different substances,streamlining the detection process and providing valuable insights for the sintering process.

关 键 词：遥感测量 激光诱导击穿光谱 烧结混合料 偏最小二乘法 延时变化 

分 类 号：O433.4[机械工程—光学工程] TF521[理学—光学]