连续镀膜在真空蒸镀中的应用  

Application of continuous coating in vacuum evaporation coating

作　　者：林启璇 韩辉[1] 张松林 LIN Qixuan;HAN Hui;ZHANG Songlin

机构地区：[1]沈阳理工大学机械工程学院,辽宁沈阳110000 [2]成都超迈光电科技有限公司,四川成都610100

出　　处：《现代机械》2024年第3期13-18,共6页Modern Machinery

摘　　要：蒸发镀膜是现有薄膜沉积中最为泛用的镀膜技术。针对现有蒸发镀膜设备在进行大批量薄膜制备时效率低下这一问题,基于规模生产需求设计了一种连续式蒸发镀膜设备,该设备通过设置多个仓室,仓与仓之间通过隔断阀连接,用以保持薄膜沉积仓内的真空度,真空室内设有工件盘自动装卡装置,可以节约大批量薄膜制备时重复真空抽气的时间及人工装卡时间。通过理论验算、真空抽气时间计算、受力仿真验证了结构的可行性和薄膜沉积效率的提升。Evaporation coating is the most widely used coating technology in existing thin film deposition.This article addresses the issue of low efficiency in large-scale film preparation using existing evaporation coating equipment,and designs a continuous evaporation coating equipment based on the needs of large-scale production.This equipment is equipped with multiple compartments connected by isolation valves to maintain the vacuum inside the thin film deposition compartment.The vacuum compartment is equipped with a workpiece disc automatic clamping device,which can save the time for repeated vacuum pumping and manual clamping during large-scale thin film preparation.Theoretical verification,vacuum pumping time calculation,and force simulation have been conducted to verify the structural feasibility of the equipment and improve the efficiency of thin film deposition.

关 键 词：蒸发镀膜 连续镀膜 真空保持 气路设计 

分 类 号：TN305.8[电子电信—物理电子学]