交流定温电桥正交锁定放大真空度检测系统设计  

Design of the vacuum measurement system with the AC constant temperature bridge and the orthogonal locking amplification

作　　者：陈勇 于占东[1] 谭金博 CHEN Yong;YU Zhandong;TAN Jinbo(College of Control Science and Engineering,Bohai University,Jinzhou 121013,China)

机构地区：[1]渤海大学控制科学与工程学院,辽宁锦州121013

出　　处：《电子设计工程》2024年第17期45-50,56,共7页Electronic Design Engineering

基　　金：国家自然科学基金(61673071)。

摘　　要：针对中低真空环境高精度测量领域,提出了交流定温电桥正交锁定放大真空度检测方案。以电阻式真空规管作为桥臂构成定温电桥,并采用可调幅400 Hz交流信号激励。交流定温电桥的失调电压采用双相正交锁定放大技术进行精确提取。为使交流定温电桥保持在动态平衡状态,设计了PI调节器,并通过临界比例度法完成了校正环节的参数整定。仿真和实验表明,交流定温电桥正交锁定放大真空度检测方案可以在1×10^(2)~1×10^(5)Pa范围内,将真空度测量误差控制在10%以内,验证了该方案的有效性和可行性。For high⁃precision measurement in the field of medium⁃low vacuum environments,the vacuum degree measurement scheme based on AC constant⁃temperature bridge and orthogonal locking amplif⁃ication is proposed.The measurement scheme utilizesthe constant⁃temperature bridge with a resistance vacuum gauge as a bridge arm and excites the bridge with a controllable 400 Hz AC signal.The offset voltage of the AC constanttemperature bridge is accurately extracted by using a dual⁃phase orthogonal locking amplification technology.In order to keep the AC constanttemperature bridge in a dynamic balance state,a PI controller is designed,and the parameter setting of the calibration process is completed through the critical proportion method.Simulation and experiments show that the scheme can reduce the vacuum measurement error within 10%in the range of 1×10^(2)~1×10^(5)Pa,which confirms the effectiveness and feasibility of the measurement scheme.

关 键 词：真空度检测 交流定温电桥 失调电压 锁定放大 

分 类 号：TN102[电子电信—物理电子学]