温度对金属微互连结构界面微裂纹扩展连通过程的影响  

Effect of Temperature on Propagation and Connectivity of Microcracks in Metal Micro-interconnection Structures Interconnects

作　　者：马文婧 王进 郭慧 吕美妮 张宏泽 宋宝林 MAWenjing;WANGJin;GUOHui;LYUMeini;ZHANGHongze;SONGBaolin(Guangxi Key Laboratory of Machine Vision and Intelligent Control,Wuzhou 543002,China;School of Electronic and Information Engineering,Wuzhou University,Wuzhou 543002,China)

机构地区：[1]广西机器视觉与智能控制重点实验室,广西梧州543002 [2]梧州学院电子与信息工程学院,广西梧州543002

出　　处：《热加工工艺》2024年第14期122-126,129,共6页Hot Working Technology

基　　金：国家自然科学基金项目资助(51765060,62162054);中央引导地方科技发展资金项目资助(桂科AD20238053);广西高校中青年教师科研基础能力提升项目(2019KY0691,2020KY17010);梧州学院重大项目(2017A004,2017A005)。

摘　　要：采用晶体相场方法在纳米尺度下对金属微互连结构界面微裂纹扩展连通过程进行了研究。结果表明:随着温度的升高和演化时间的增加,微裂纹扩展过程中主裂纹长度增大,二次微裂纹数量增多,微裂纹呈“一字形”和“树枝状”生长,微裂纹扩展过程中的连通行为逐渐增多。初始缺口形貌为圆形的微裂纹在扩展过程中主裂纹长度和二次微裂纹出现的时间均比初始缺口形貌为矩形的慢。微裂纹扩展长度随着演化时间和温度的增加逐渐增大;微裂纹扩展速率随着温度的增加而增大,但随着演化时间的增加,呈先增加后减小趋势。温度并不改变原子波动周期,不同温度下微裂纹的扩展只取决于原子扩散速率,与原子间距无关。The phase field crystal method was employed to investigate the microcrack propagation and connection process at the interface of metal micro-interconnection structures at nanoscale.The results show that with the increase of temperature and evolutionary time,the length of the main crack and the number of secondary microcracks increases in the propagation process.The micro-cracks develop with a"line-shaped"and"dendritic"shape,and the connectivity behaviors gradually increase during the micro-crack propagation process.The length of the primary crack and the appearance time of the secondary microcrack during the propagation process of the microcrack with a circular initial notch shape are slower than those with a rectangular initial notch shape.The propagation length of microcrack increases gradually with the increase of evolutionary time and temperature.The propagation rate of the microcracks increases with the increase of the evolution temperature.However,with the prolongation of time,it shows a tendency to initially increase and then decline.The temperature does not change the atomic fluctuation period.The propagation of the microcracks at different temperatures only depends on the atomic diffusion rate,but not on the interatomic distance.

关 键 词：微裂纹 扩展连通 晶体相场方法 微观组织演化 

分 类 号：TG111.2[金属学及工艺—物理冶金]