不同衬底沉积的Co/Pt多层膜及Co层厚度对其垂直磁各向异性的影响  

Co/Pt multilayers deposited on different substrates and the influence of Co layer thickness on their perpendicular magnetic anisotropy

作　　者：李梦超 杨华礼[2] LI Meng-chao;YANG Hua-li(College of Materials Science and Engineering,Zhejiang University of Technology,Hangzhou 310034,China;Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]浙江工业大学材料科学与工程学院,浙江杭州310034 [2]中国科学院宁波材料技术与工程研究所,浙江宁波315201

出　　处：《磁性材料及器件》2024年第4期13-18,共6页Journal of Magnetic Materials and Devices

基　　金：国家自然科学基金资助项目(51931011,52127803)。

摘　　要：采用直流磁控溅射方法,分别在100μm厚的聚偏氟乙烯(PVDF)、聚酰亚胺(PI)和Si衬底上沉积Ta(2 nm)/Pt(20 nm)[Co(t)/Pt(0.5 nm)]4/Pt(1.5 nm)的磁性多层膜。考察了Co层厚度及刚性Si、柔性PVDF和PI衬底对Co/Pt多层膜垂直磁各向异性的影响。结果表明,Co/Pt多层膜的垂直磁各向异性随着Co的厚度增大而减弱,表现为磁畴尺寸随Co的厚度增大而减小。通过对比生长在刚性衬底与柔性衬底上的Co/Pt多层膜的磁各向异性常数、矫顽力、磁畴尺寸,发现制备的柔性Co/Pt多层膜仍保持优异的垂直磁各向异性,其垂直磁各向异性与刚性衬底上生长的薄膜相近。Ta(2 nm)/Pt(20 nm) [Co(t)/Pt(0.5 nm)]4/Pt(1.5 nm) magnetic multilayers were deposited on 100 μm thick polyvinylidene fluoride(PVDF),polyimide(PI) and Si substrates by DC magnetron sputtering method.The influence of Co layer thickness and rigid Si,flexible PVDF and PI substrates on perpendicular magnetic anisotropy of Co/Pt multilayers were investigated.The results indicate that perpendicular magnetic anisotropy of Co/Pt multilayers decreases with the increase of Co thickness,and the magnetic domain size decreases with the increase of Co thickness.By comparing the magnetic anisotropy constant,coercivity and magnetic domain size of Co/Pt multilayers grown on rigid and flexible substrates,it is found that the prepared flexible Co/Pt multilayers still maintain excellent perpendicular magnetic anisotropy,and their perpendicular magnetic anisotropy is similar to that grown on rigid substrate.

关 键 词：Co/Pt多层膜 Co层厚度 垂直磁各向异性 柔性衬底 磁畴 

分 类 号：TG115.271[金属学及工艺—物理冶金]