脉冲激光沉积法制备YSZ薄膜的导电机制  

Electric Transport Properties of YSZ Films Prepared by Pulsed Laser Deposition

作　　者：张靖松 曹林洪[1,2] 王进 符亚军[1,2] 蒋玉苹 唐维 ZHANG Jingsong;CAO Linhong;WANG Jin;FU Yajun;JIANG Yuping;TANG Wei(School of Materials Science and Chemistry,Southwest University of Science and Technology,Mianyang 621000,China;Sichuan Civil-military Integration Institute,Mianyang 621000,China)

机构地区：[1]西南科技大学材料与化学学院,四川绵阳621000 [2]四川省军民融合研究院,四川绵阳621000

出　　处：《材料科学与工程学报》2024年第3期442-448,455,共8页Journal of Materials Science and Engineering

基　　金：西南科技大学博士学位基金资助项目(19ZX7131,18ZX7132);四川省自然科学基金青年基金资助项目(2022NSFSC2014)。

摘　　要：YSZ薄膜氧气传感器的微型化和高灵敏度是其未来的发展趋势,厘清氧离子在薄膜中的输运机制是提高氧气传感性能的关键。鉴于此,本研究采用脉冲激光沉积技术在单晶Si(100)衬底上制备了YSZ薄膜,并采用X射线衍射、扫描电子显微镜、X射线光电子能谱等技术研究了薄膜制备工艺对其成分、结构和导电特性的影响。研究结果显示YSZ薄膜结构呈多晶立方相,退火温度对YSZ薄膜的性质有显著的调控作用。一方面,高温退火使薄膜的平均晶粒尺寸显著增大,因而能大幅提高薄膜的电导率;另一方面,退火又调控了薄膜中的Zr、Y、O元素的含量比,且当O含量增加时,薄膜的电导率降低。此外,本研究还表明,YSZ薄膜经高温退火(T≥1073 K)后,呈现典型固体电解质的离子导电特性。进一步地,在313 K至873 K范围内,YSZ薄膜具有两个温度拐点,预示其存在三种导电机制。经计算,YSZ薄膜在高温段的激活能与文献报道相符。本研究对脉冲激光沉积制备特定需求的YSZ薄膜提供了一定的技术参数。The future development trend of oxygen sensors based on YSZ films is the miniaturization and high sensitivity.The key to improve the performance of oxygen sensing sensors is clarifying the transport mechanism of oxygen ions in the film.In this paper,YSZ thin films were prepared on Si(100)substrates by pulsed laser deposition.The effects on the composition,structure and electrical conductivity were studied by XRD,SEM and XPS.The results show that the structure of YSZ films is polycrystalline cubic phase,and the annealing temperature has a significant effect on the properties of YSZ films.The high temperature annealing not only significantly increases the average grain size of the film,but also greatly improves the conductivity of the film.On the other hand,the annealing regulates the element content ratios of Zr,Y and O in the film.When the O content increases,the conductivity of the film decreases.In addition,this study shows that the YSZ film exhibits the ionic conductivity of typical solid electrolyte after high temperature annealing(T≥1073 K).Further,the YSZ film has two temperature inflection points in the range from 313 K to 873 K,indicating that there are three conduction mechanisms.The calculated activation energy of YSZ films at high temperatures is consistent with that reported in the literature.This study provides a theoretical basis for the preparation of YSZ thin films with specific requirements by pulsed laser deposition.

关 键 词：脉冲激光沉积 YSZ薄膜 离子电导 退火温度 

分 类 号：TB43[一般工业技术]