基于微声技术的电缆头温度传感器研究  

Research on cable head temperature sensor based on micro-acoustic technology

作　　者：傅军 王海鱼 杨舟浩 范彦平[3] FU Jun;WANG Haiyu;YANG Zhouhao;FANG Yanping(Schneider Electric(China)Co Ltd,Shanghai 201203,China;Chengdu Shengbang Dual Core Technology Co Ltd,Chengdu 610299,China;School of Optical-Electrial and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]施耐德电气(中国)有限公司,上海201203 [2]成都盛帮双核科技有限公司,四川成都610299 [3]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《传感器与微系统》2024年第8期53-55,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(52075339,51705326)。

摘　　要：针对电缆头内部测温需求,设计了一种基于微声技术的无线无源电缆头温度传感器。通过压电本构方程、边界条件和非线性微扰理论建立了声表面波(SAW)温度敏感理论模型。综合优选(0°,142°,0°)石英作为SAW温度传感器的压电基底。根据有限元方法(FEM)/边界元法(BEM)理论设计的SAW谐振器参数制作了温度敏感的SAW谐振器,得到中心频率为433.636 MHz,无载Q值为13041。把制作的SAW谐振器与天线嵌入在电缆头堵头中以构成无线无源SAW电缆头温度敏感单元,该敏感结构在10 kV电压下局放为5 pC,满足设计要求。最后,对设计的传感器进行了温度测试,得到SAW谐振器的频率变化量与温度之间成单调递增的关系。In order to measure the interior temperature of the cable head,a wireless passive cable head temperature sensor based on micro-acoustic technology is designed.Temperature sensitive theoretical model of surface acoustic wave(SAW)is established by piezoelectric constitutive equation,boundary condition and nonlinear perturbation theory.Comprehensively optimizing quartz(0°,142°,0°)as piezoelectric substrate of SAW temperature sensor.According to the FEM/BEM theory,parameters of Temperature sensitive SAW resonator are designed and fabricated.The center frequency is 433.636 MHz,and the unloaded Q value is 13041.By embedding the SAW resonator and antenna into the cable head plug,the wireless passive SAW cable head temperature sensing element is fabricated,and the partial discharge of sensitive structure is 5 pC under 10 kV voltage,which meets the design requirements.Finally,the temperature test on designed sensor is carried out,and the monotonically increasing relationship between the frequency variation of SAW resonator and temperature is obtained.

关 键 词：微声技术 无线无源 电缆头 温度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TM932[自动化与计算机技术—控制科学与工程]