基于Ansys Maxwell巨磁阻隔离器结构中线圈磁场的研究  

Research on coil magnetic field in giant magnetoresistive isolator structure based on Ansys Maxwell

作　　者：吴回州 李尧 卢启海[2] 刘良朋 宋玉哲[2] WU Huizhou;LI Yao;LU Qihai;LIU Liangpeng;SONG Yuzhe(School of Electronic and Information Engineering,Lanzhou Jiaotong University,Lanzhou 730070,China;Institute of Sensing Technology,Gansu Academy of Sciences,Gansu Provincial Key Laboratory of Sensors and Sensing Technology,Lanzhou 730000,China)

机构地区：[1]兰州交通大学电子与信息工程学院,甘肃兰州730070 [2]甘肃省科学院传感技术研究所甘肃省传感器与传感技术重点实验室,甘肃兰州730000

出　　处：《传感器与微系统》2024年第8期64-67,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51761001,61905102,62264008);甘肃省科学院重大专项资助项目(2023ZDZX-02);兰州市城关区科技计划资助项目(2022JSCX0015);甘肃省重点研发计划资助项目(22YF7GA063);甘肃省基础研究创新群体资助项目(23TRRA1348);兰州市青年科技人才创新项目(2023-QN-119)。

摘　　要：巨磁阻(GMR)隔离器中平面线圈的主要作用是将电信号转化为磁信号,为了确定平面线圈的具体参数,基于Ansys Maxwell/2D对GMR隔离器结构中平面线圈的磁场影响参数进行扫描分析,确定了GMR隔离器的输入电流为5.94 mA,结合现有工艺条件,确定了平面线圈线宽5μm,线间距2μm,厚度2μm及线圈中心间距100μm。进一步利用Maxwell/3D建立平面线圈的3D模型,对该模型进行静磁场下的磁场强度分析,平面线圈在正下方13μm厚度的SiO_(2)隔离栅处产生的磁场强度为4.18 Oe左右,满足GMR隔离器的制作要求,为GMR隔离器平面线圈的设计提供参考。The main function of the planar coil in giant magnetoresistive(GMR)isolator is to convert electric signal into magnetic signal,in order to determine the specific parameters of the planar coil,scanning analysis of magnetic field influence parameters of planar coils in GMR isolator structures is carried out.Based on Ansys Maxwell/2D,the input current of the GMR isolator is determined as 5.94 mA,combined with the existing process conditions line width,line spacing,and thickness of the planar coil are determined as 5μm,2μm,and 2μm,respectively,and the coil center distance is 100μm.Further more,the 3D model of the planar coil is established using Maxwell/3D and the magnetic field strength under a static magnetic field is analyzed.The planar coil produces a magnetic field strength of about 4.18 Oe at the 13μm thickness of SiO_(2) barrier directly below it,which meets the requirements of the fabrication of GMR isolators,and provide a reference for the planar coil of the GMR isolator.

关 键 词：巨磁阻隔离器 平面线圈 Ansys Maxwell 静磁场 磁场强度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]