基于DLP投影光刻方法的PDMS柔性磁轴编码驱动器  

PDMS flexible magnetic axis encoding actuators based on DLP projection lithography method

作　　者：李鹏举 张聪 李瑞 LI Pengju;ZHANG Cong;LI Rui(College of Engineering and Science,University of Science and Technology of China,Hefei 230031,China)

机构地区：[1]中国科学技术大学工程科学学院,安徽合肥230031

出　　处：《传感器与微系统》2024年第8期165-168,共4页Transducer and Microsystem Technologies

摘　　要：传统的聚二甲基硅氧烷(PDMS)磁轴编码的方法依赖于固定模具单向磁化、喷墨3D打印和重编码等方法,存在编码自由度不足、编码稳定性差等问题。本文报告了一种基于数字光处理(DLP)投影光刻的紫外(UV)光固化方法,利用光敏PDMS将磁性颗粒的重定向与图案化分块UV曝光相结合,实现对PDMS材料的快速、图案化、多自由度的磁性编程。本文对该方法加工的PDMS磁轴编码驱动器的进行了性能测试,并展示了该方法在柔性变形装置与软体机器人领域的应用。Traditional magnetic axis encoding methods with polydimethylsiloxane(PDMS)rely on one-way magnetization with fixed mold,inkjet 3D printing and re-coding methods,which have some problems such as lack of encoding freedom and poor encoding stability.An UV photocuring method based on digital light processing(DLP)projection lithography is reported,combining the reorientation of magnetic particles with patterned block UV exposure by using photosensitive PDMS to achieve fast,patterned,multi-DOF magnetic programming on PDMS.The performance of PDMS magnetic axis encoding actuators with programmable fabricated by this method is tested,and its application in the field of flexible deformation device and soft robot is demonstrated.

关 键 词：数字光处理投影光刻 光敏聚二甲基硅氧烷 磁响应驱动器 磁轴编码 柔性变形装置 软体机器人 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]