柔性超导电路制备工艺技术研究  

Research on Fabrication of Flexible Superconducting Circuits

作　　者：朱承峰 李万 陈建 孙潇莹 曾九孙 蔡晋辉 王振宇 李劲劲[3] 王雪深[3] ZHU Chengfeng;LI Wan;CHEN Jian;SUN Xiaoying;ZENG Jiusun;CAI Jinhui;WANG Zhenyu;LI Jinjin;WANG Xueshen(College of Metrology and Testing Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;College of Physics,Sichuan University,Chengdu,Sichuan 610065,China;National Institute of Metrology,Beijing 102200,China;Jinan Institute of Quantum Technology,Jinan,Shandong 250101,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]四川大学物理学院,四川成都610065 [3]中国计量科学研究院,北京102200 [4]济南量子技术研究院,山东济南250101

出　　处：《计量学报》2024年第7期929-934,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2022YFF0608303)。

摘　　要：超导转变边沿探测器是坎德拉单位量子化复现和单能X射线量子计量的核心器件。大规模超导转变边沿探测器阵列探头的信号读出需利用柔性超导电路将信号传输至探头侧面的超导量子干涉器件。柔性超导电路是将超导信号线制备在柔性聚酰亚胺衬底上以实现信号低热导率、无阻传输。以硅片作为临时支撑,电子束蒸发100 nm Cr膜作为剥离牺牲层。非光敏聚酰胺酸旋涂在Cr膜上固化后,通过紫外曝光、溅射薄膜沉积和剥离等工艺制备Nb/Al薄膜传输线结构,利用Cr膜高应力特性将聚酰亚胺薄膜从硅片上剥离,湿法腐蚀Cr膜完成柔性超导电路的制备。测试的40根Nb/Al传输线的超导转变温度T_(c)为8.91~9.02 K,剩余电阻比r_(RR)为5.83~6.96。温度为8 K时,38根传输线临界电流I_(c)超过1 mA;温度为4.2 K时,所有样品I_(c)均超过1 mA,其中有25根传输线I_(c)超过10 mA,满足超导转变边沿探测器阵列测试需求。The superconducting transition edge sensor(TES)is the key device for the quantum reproduction of the Candela(Cd)unit and single energy X-ray quantum metrology.Transferring the signal from the large-scale TES array to the readout superconducting quantum interference device(SQUID)electronics on the side of the sensor unit relies on the flexible superconducting circuits.Superconducting transmission lines are fabricated on a flexible polyimide substrate for the low thermal conductivity and resistance-free signal transmission.A silicon(Si)wafer is used as a temporary supporting substrate,and a 100 nm Cr film as the sacrificial layer to release the polyimide(PI)film is e-beam evaporated on the Si.Polyimide acid is spin-coated on the Cr film and cured to form the PI film.The Nb/Al thin film transmission lines are fabricated onto the PI film by UV exposure,sputtering and lift-off processes.Then the PI film is released from the silicon substrate due to the high tensile stress of the Cr film,and then the Cr film is wet etched to complete the preparation of flexible superconducting circuits.The superconducting transition temperature T_(c)of the measured 40 Nb/Al transmission lines are 8.9.~9.02 K,and the residual resistance ratio(r_(RR),r_(300 K)/r_(10 K))are 5.83~6.96.At 8 K,the critical current I_(c)of 38 samples is greater than 1 mA.At 4.2 K,the I_(c)of all the samples is greater than 1 mA,of which 25 samples are larger than 10 mA.The T_(c)and I_(c)satisfy the requirement of the signal transmission of the TES arrays.

关 键 词：电学计量 超导转变边沿探测器 聚酰亚胺 柔性超导电路 超导转变温度 临界电流 

分 类 号：TB971[一般工业技术—计量学]