碳化硅晶片生产废水处理工程实例  

Case Study on Wastewater Treatment Engineering for Silicon Carbide Wafer Production

作　　者：訾培建 Zi Peijian(Shanghai Tianyue Semiconductor Materials Co.,Ltd.,Shanghai,201306)

机构地区：[1]上海天岳半导体材料有限公司,上海201306

出　　处：《当代化工研究》2024年第15期96-98,共3页Modern Chemical Research

摘　　要：本研究选取上海某碳化硅晶片制造企业的生产废水处理项目进行案例分析。该企业的生产废水分别排至含氟、含氨、研磨及最终中和处理系统进行处理,采用化学沉淀、吹脱-吸收、混凝沉淀、酸碱中和等工艺进行处理,运行结果表明,废水处理最终出水水质满足《电子工业水污染物排放标准》(GB 39731—2020)中表1要求。本研究不仅为碳化硅晶片制造业的废水处理提供了技术参考,还针对废水排放量超出行业基准排水量的问题,提出了加强废水回收利用、中水回用等切实可行的改进措施。This study selects a silicon carbide wafer manufacturing enterprise in Shanghai for a case analysis of its production wastewater treatment project.The wastewater of the enterprise is discharged into containing fluoride,ammonia,grinding,and final neutralization treatment systems.Chemical precipitation,air stripping-absorption,coagulation sedimentation,and acid-base neutralization processes are used for treatment.The operational results show that the final effluent water quality meets the requirements of table 1 in the“Electronics Industry Water Pollutant Emission Standard”(GB 39731—2020).This study not only provides technical references for the wastewater treatment of the silicon carbide wafer manufacturing industry but also proposes feasible measures for strengthening wastewater recycling,and the reuse of treated water,in response to the issue of wastewater discharge exceeding the industry benchmark discharge volume.

关 键 词：碳化硅晶片 废水处理 悬浮物 氨氮 氟化物 沉淀 酸碱中和 

分 类 号：X703[环境科学与工程—环境工程]