压电俘能结构力-电耦合特性有限元仿真分析  

Finite Element Simulation Analysis of the Mechanical-electric Coupling Characteristics of Piezoelectric Energy Harvesters

作　　者：王梦雨 师阳 WANG Mengyu;SHI Yang(Applied Mechanics Research Center,School of Mechanical and Electrical Engineering,Xidian University,Xi’an 710071)

机构地区：[1]西安电子科技大学机电工程学院应用力学研究中心,西安710071

出　　处：《微电子学》2024年第3期475-480,共6页Microelectronics

基　　金：陕西省自然科学基础研究计划项目(2024JC-YBMS-069);中央高校基本科研业务费资助项目(ZYTS24026)。

摘　　要：基于有限元方法对压电悬臂梁进行力电特性数值仿真,研究了不同截面形状压电悬臂梁的力-电特性,发现相比于矩形压电悬臂梁,梯形压电悬臂梁有较高的输出电压和一阶共振频率。进一步分析了梯形压电悬臂梁的压电片长度、压电片位置、基板-压电片厚度比对其性能的影响。结果表明,当压电片长度越短,且位置越靠近固定端时,梯形悬臂梁的输出性能越好,但一阶共振频率随着压电片长度的减小和与固定端距离的增加而降低;当基板-压电片厚度比为1.6时,梯形悬臂梁的电学输出特性最佳,一阶共振频率随着厚度比的增大而增大。Using the finite element method,the mechanical-electric characteristics of piezoelectric cantilever beams are numerically simulated,and the mechanical-electric characteristics of piezoelectric cantilever beams with different cross-sectional shapes are studied.We observe that the piezoelectric cantilever beam with a trapezoidal section has higher output voltage and first-order resonance frequency than that with a rectangular section.The effects of the length and position of the piezoelectric sheet and the thickness ratio of the substrate to piezoelectric sheet on the output performance are further analyzed.The results show that when the length of the piezoelectric sheet or the distance of the piezoelectric sheet from the fixed end are reduced,the output performance of the trapezoidal cantilever beam is enhanced,whereas the first-order resonance frequency decreases as the length of the piezoelectric sheet decreases or the distance from the fixed end increases.When the thickness ratio of the substrate to the piezoelectric sheet is 1.6,the electrical output of the trapezoidal cantilever reaches the maximum value,but the first-order resonance frequency increases with increasing thickness ratio.

关 键 词：压电悬臂梁 力-电特性 有限元仿真 结构优化 

分 类 号：TN389[电子电信—物理电子学]