基于空间光调制器的飞秒激光双光子高效加工(特邀)  

Femtosecond Laser Two-Photon High-Efficiency Processing Based on Spatial Light Modulator(Invited)

作　　者：唐枫 潘登 俞飞 黄锟境 胡衍雷[1] 吴东[1] 李家文[1] Tang Feng;Pan Deng;Yu Fei;Huang Kunjing;Hu Yanlei;Wu Dong;Li Jiawen(Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230026,Anhui,China;Information Materials and Intelligent Sensing Laboratory of Anhui Province,Anhui University,Hefei 230601,Anhui,China)

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230026 [2]安徽大学信息材料与智能感知安徽省实验室,安徽合肥230601

出　　处：《中国激光》2024年第12期162-177,共16页Chinese Journal of Lasers

基　　金：国家自然科学基金(52175502,51675503,52075516,62205236)。

摘　　要：基于非线性光学效应的飞秒激光双光子聚合加工技术可以突破光学衍射极限,从而实现复杂构型的三维微纳结构制备。近年来,研究者们将空间光调制器应用于飞秒激光双光子加工系统,改进了传统逐点扫描的加工方法,进一步提高了加工效率和加工精度。综述了近年来国内外基于空间光调制器的飞秒激光双光子聚合加工技术的研究进展,主要论述了光场调制技术的发展过程和主要实现方法,包括基于迭代算法的全息加工、基于结构光场的全息加工、干涉全息加工以及时空聚焦高效加工等几个方面,分析了各种方法的优势与不足,并对其在各领域中的应用做出讨论。最后,探讨了该加工方法目前存在的问题,并对未来进行了展望。Significance Femtosecond laser two-photon polymerization(TPP)technology enables the direct three-dimensional(3D)printing of micro-nano structures with submicron precision.This technology has broad application prospects in many fields.Conventional femtosecond laser TPP uses a point-by-point scanning strategy to shape 3D structures.Specifically,it requires the focused spot to traverse the 3D spatial coordinates of the structure to be processed,thus rendering the efficient fabrication of 3D devices challenging.Consequently,the application of this technology is limited in various fields.Optical modulation technology can be applied to modulate incident light into the target light field,which significantly improves the processing efficiency and reduces the processing time.Thus,it can serve as a basis for high-throughput large-area manufacturing.A spatial light modulator(SLM)is a diffractive optical device that modulates the wavefront of a light wave.It can modulate a light beam into a predesigned spatial light field.SLMs can be categorized into phase and amplitude types depending on the modulation physical quantities.The most commonly used devices are liquid-crystal spatial light modulators(LC-SLMs)and digital micromirror devices(DMDs).In recent years,researchers have used SLMs to modulate various forms of light fields.Based on the modulated light fields,they have efficiently processed and fabricated micro-nano structures with specific shapes,thereby improving the efficiency and processing accuracy of femtosecond laser TPP.Herein,the main research achievements of SLM-assisted TPP technology in the past decade are summarized,including holographic processing based on iterative algorithms,holographic processing based on structured light fields,interferometric holographic processing,and spatiotemporal focusing.The advantages and disadvantages of various methods are analyzed,and their applications in various fields are discussed.Finally,existing issues associated with the processing methods are discussed,and future endeavor

关 键 词：飞秒激光双光子聚合 空间光调制器 迭代算法 结构光场 干涉加工 

分 类 号：TN249[电子电信—物理电子学]