基于矢量光场的光学加工技术(特邀)  

Optical Fabrication Technology Based on Vector Optical Field(Invited)

作　　者：许丽佳 王青松[1,3] 付小芳 张其[1,3,5] 何琼 赵泽宇 罗先刚[1,3,4] Xu Lijia;Wang Qingsong;Fu Xiaofang;Zhang Qi;He Qiong;Zhao Zeyu;Luo Xiangang(State Key Lab of Optical Technologies on Nano-Fabrication and Micro-Engineering,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,Sichuan,China;School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,Sichuan,China;National Key Laboratory of Optical Filed Manipulation Science and Technology,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,Sichuan,China;College of Materials Sciences and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China;Research Center on Vector Optical Fields,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,Sichuan,China)

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209 [2]电子科技大学自动化工程学院,四川成都611731 [3]中国科学院光电技术研究所光场调控科学技术全国重点实验室,四川成都610209 [4]中国科学院大学材料科学与光电技术学院,北京100049 [5]中国科学院光电技术研究所矢量光场研究中心,四川成都610209

出　　处：《中国激光》2024年第12期191-205,共15页Chinese Journal of Lasers

基　　金：国家重点研发计划(2018YFA0701800,2021YFA1401003)。

摘　　要：作为光的基本属性,偏振、振幅和相位提供的自由度对于光场调控具有重要作用。具有空间结构偏振态、振幅和相位分布的矢量光场因具有不同于传统光场的独特性质而被应用于诸多领域。近年来,时空分布特性更加丰富的新型矢量光场逐渐得到关注,它们的出现丰富了矢量光场的种类并提供了新的调控自由度,为光学加工带来了新的契机。综述了近年来发展迅速的基于矢量光场的光学加工技术,包括基于矢量光场的激光微纳制造和基于矢量光场曝光的几何相位液晶平面器件加工等技术,并对其发展趋势和前景进行了展望。Significance As the basic properties of light,the degrees of freedom provided by polarization,amplitude,and phase play an important role in light modulation.Vector optical fields(VOFs)with spatially structured polarization,amplitude,and phase have been widely applied in various fields because of their unique properties,which differ from those of traditional optical fields.In recent years,new vector optical fields with more abundant spatiotemporal characteristics have attracted intense attention.The emergence of such optical fields enriches the types of vector optical beams and provides a new degree of freedom for light modulation,thereby bringing about a new opportunity for optical processing.Traditional laser processing mainly focuses on the energy characteristics of the laser.Nevertheless,momentum exchange occurs in addition to energy absorption during the interaction of light and matter.Compared with the scalar optical field,the vector optical field can converge to the focal spot beyond the diffraction limit.Moreover,the spot size is smaller.Hence,the processing accuracy can be higher.Furthermore,the light field with the photonic angular momentum can exchange momentum with matter.For instance,a vector vortex light that carries photonic orbital angular momentum can drive a particle to rotate along a fixed axis.Therefore,the momentum characteristics of vector optical fields are promising and attractive for applications in the field of laser processing,such as the induction of complex patterns or chiral structures.Progress This review covers the rapid development of optical processing technology based on vector optical fields in recent years,including vector beam-based laser micro/nanofabrication and geometric phase liquid crystal planar device processing technology.The spatial topology of the vector optical field in the inherent features of the beam,such as polarization,amplitude,and phase,allows for the fine manipulation of the interaction between the laser and matter,resulting in a diverse and intricate proces

关 键 词：矢量光场 光学加工 激光微纳制造 光场曝光 液晶平面器件 悬链线光学 

分 类 号：O436.1[机械工程—光学工程]