无机材料飞秒激光3D打印技术研究进展(特邀)  

Research Progress on Femtosecond Laser 3D Printing Technology of Inorganic Materials(Invited)

作　　者：侯郑为 刘少峰 林琳涵 李正操 孙洪波[2,3] Hou Zhengwei;Liu Shaofeng;Lin Linhan;Li Zhengcao;Sun Hongbo(School of Materials Science and Engineering,Key Laboratory of Advanced Materials of Ministry of Education,Tsinghua University,Beijing 100084,China;Department of Precision Instrument,State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;College of Electronic Science&Engineering,State Key Laboratory of Integrated Optoelectronics,Jilin University,Changchun 130012,Jilin,China)

机构地区：[1]清华大学材料学院,先进材料教育部重点实验室,北京100084 [2]清华大学精密仪器系,精密测试技术及仪器全国重点实验室,北京100084 [3]吉林大学电子科学与工程学院,集成光电子学国家重点实验室,吉林长春130012

出　　处：《中国激光》2024年第12期206-226,共21页Chinese Journal of Lasers

基　　金：国家重点研发计划(2020YFA0715000);国家自然科学基金(62075111,61960206003);精密测试技术及仪器国家重点实验室自主课题;清华大学自主科研计划。

摘　　要：飞秒激光三维(3D)打印具有无掩模、高精度、高分辨率、真三维制造等特点,在复杂微纳3D结构制造上难以替代,基于双光子聚合打印技术,已经在微机电、微纳光电、微纳光子等复杂器件制备上展现出巨大的应用前景。随着共混掺杂技术及新型无机光敏材料的发展,高无机功能材料占比的飞秒激光3D打印为高性能器件制备提供了更多的可能性,极大拓展了微纳3D制造的应用能力。围绕近年来基于无机材料体系的飞秒激光3D打印方法,从无机组分工艺、激光打印能力、无机功能材料体系及应用等方面总结现有飞秒激光3D打印微纳器件应用、发展前景及面临的挑战,并展望飞秒激光打印无机3D微纳结构的新材料、新方法、新应用。Significance Micro and nano manufacturing is increasingly important in today’s information society as the demand for integrated manufacturing increases.In the face of complex micro-nano structure manufacturing requirements in the fields of microelectromechanics,micro-optoelectronics,and micro-nano optics,the traditional two-dimensional(2D)machining processes such as photolithography and nanoimprinting lithography have some limitations.On the one hand,these two-dimensional machining processes are only capable of manufacturing 2D or 2.5-dimensional(2.5D)structures,making it difficult to process elaborate three-dimensional(3D)structures.And on the other hand,due to their high cost,they are not suitable for small batches and personalized processing needs.Laser 3D printing is a mask-less micro-nano manufacturing method.Laser 3D printing methods represented by two-photon polymerization have been able to achieve high-precision complex three-dimensional structure preparation at the hundreds of nanometers level,which greatly meets the demand for three-dimensional micro-nano fabrication.In order to further apply laser printing to functional electronics and optoelectronics,it is crucial to realize three-dimensional micronano fabrication of inorganic functional materials.However,including two-photon polymerization,most laser writing threedimensional fabrication methods rely on organic components as structural scaffolds.These organic components seriously hinder electrical conduction,making it difficult to apply the fabricated structure to optoelectronics and other devices.Therefore,the usual approach is to use heat treatment,etching or other methods to remove organic components in fabricated structures to increase the proportion of inorganic components.Nevertheless,these treatments will also bring about some serious problems,such as:structural shrinkage,surface quality degradation,oxidation,etc.These structural defects bring huge disadvantages to the application of highperformance inorganic functional structures.Thus,the de

关 键 词：激光技术 飞秒激光 3D打印 纳米技术 无机材料 功能材料 

分 类 号：TN249[电子电信—物理电子学]