飞秒激光打印倾斜微结构在固液界面的变形研究(特邀)  

Deformation of Tilted Microstructures at Solid‒Liquid Interface Based on Femtosecond Laser Printing(Invited)

作　　者：祁乔乔 李鑫凯 胡海健 陈超 张晨初 张亚超 吴思竹 劳召欣 Qi Qiaoqiao;Li Xinkai;Hu Haijian;Chen Chao;Zhang Chenchu;Zhang Yachao;Wu Sizhu;Lao Zhaoxin(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Optoelectronic Engineering,Hefei University of Technology,Hefei 230009,Anhui,China;Department of Materials Physics and New Energy Materials‒Devices,School of Materials Science and Engineering,Hefei University of Technology,Hefei 230009,Anhui,China;School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,Anhui,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥230009 [2]合肥工业大学材料科学与工程学院材料物理及新能源材料与器件系,安徽合肥230009 [3]合肥工业大学机械工程学院,安徽合肥230009

出　　处：《中国激光》2024年第12期422-430,共9页Chinese Journal of Lasers

基　　金：国家重点研发计划(2021YFF0502700);国家自然科学基金(52175396,62105090);合肥工业大学中央高校科研经费(JZ2022HGPA0312)。

摘　　要：在微纳制造过程中,固液耦合界面的毛细力牵引行为可能会影响微结构的稳定性,导致结构变形或倒塌。本课题组基于飞秒激光双光子打印、显影后溶剂蒸发诱导毛细力牵引过程,对单个和双倾斜微板结构在毛细力下的变形行为进行研究。通过建立固液耦合界面下倾斜微板的毛细力作用模型,综合研究了倾斜角度、微板高度和结构间距对毛细力牵引下微结构形态(内组装、倾斜和外倒塌)的影响。结果表明:固液耦合界面下结构在毛细力作用下的变形行为主要取决于结构所受毛细力(内、外毛细力)和自身支撑力之间的竞争关系。理论分析、实验结果和仿真模拟表明,在高纵横比倾斜微结构阵列中,可以通过邻近结构的耦合设计来避免不对称毛细力诱导下的微结构坍塌。本工作对涉及固液耦合情况的倾斜型、高纵横比微纳米结构的加工制造具有重要的参考意义。Objective The capillary force traction behavior at the solid‒liquid coupling interface in micro-and nano-fabrication may affect the stability of microstructures,resulting in structural deformation or collapse.Therefore,it is necessary to investigate the capillary force traction behavior of micro-and nano-structures in the case of solid‒liquid coupling.Regarding the problems caused by capillary force during evaporation drying,such as collapse of high aspect ratio structures,most of the research work focuses on how to avoid or attenuate this behavior,and a number of studies ingeniously propose the strategy of femtosecond laser printing combined with capillary force self-assembly.However,most of these studies are concentrated on avoiding or utilizing only one aspect of the capillary force,and most of the research objects are upright microstructural arrays.A few studies on the controlled collapse of tilted micro-and nano-structures under capillary forces only involve individual nanopillars,and do not explore the mutual checks and balances among multiple units under the action of capillary forces.Therefore,it is of great significance to study the deformation behavior of titled microstructures under capillary forces at the solid‒liquid interface.Methods The experimental investigation process is roughly divided into material pre-treatment,two-photon polymerization processing,development,and evaporation of the post-processing parts.In the experiment,an SZ2080 photoresist is the processing object,and before processing,the photoresist was placed on a hot plate after dropping the coverslip.It was baked at 60℃for 20 min and then at 90℃for 20 min in order to remove the solvent and form a gel.The laser processing power was adjusted,the baked sample was fixed to a 3D moving piezoelectric stage,and two-photon printing was performed after focusing.The processed samples were immersed in an anhydrous ethanol solvent for 40 min,developed to remove the uncrosslinked gel portion to obtain the processed microstructural arrays

关 键 词：飞秒激光 双光子聚合 倾斜微结构 固液耦合界面 毛细力 

分 类 号：O436[机械工程—光学工程]