ICF激光驱动装置用大尺寸激光薄膜元件  

Large⁃Size Laser Coatings for ICF Laser Drive Device

作　　者：朱美萍[1] 孙建[1] 李静平[1] 易葵[1] 邵建达[1] Zhu Meiping;Sun Jian;Li Jingping;Yi Kui;Shao Jianda(Laboratory of Thin Film Optics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院上海光学精密机械研究所薄膜光学实验室,上海201800

出　　处：《中国激光》2024年第11期155-172,共18页Chinese Journal of Lasers

基　　金：上海市优秀学术带头人计划项目(23XD1424100);上海市东方英才计划领军项目;国家自然科学基金面上项目(61975215);中国科学院稳定支持基础研究领域青年团队项目(YSBR-081)。

摘　　要：大尺寸高功率激光薄膜元件是我国神光系列等大型激光装置中的关键元件,常采用电子束蒸发技术,在高质量光学玻璃基底表面,通过交替沉积两种或多种材料制备而成。典型的高功率激光薄膜元件需具有特定的光谱性能以满足激光系统的光束传输需求,优良的力学性能以最小化波前畸变,高的激光损伤阈值以保障高功率激光装置的安全稳定运行。基于大尺寸高功率激光薄膜元件的关键性能,在调研国内外相关研究工作的基础上,重点介绍了近年来本实验室在大尺寸高功率激光薄膜的高精度膜层厚度和膜层应力控制、激光诱导薄膜损伤机理和激光薄膜损伤阈值提升技术等方面的主要研究进展,最后对该方向的研究进行了简要的总结与展望。Significance Large-size,high-power laser coatings are key components in inertial confinement fusion(ICF)laser facilities such as Shenguang(SG)series laser facilities in China,National Ignition Facility(NIF)in the USA,and the Laser Megajoule(LMJ)facility in France.The performance of coatings directly affects the beam quality and output power of the laser facilities.The large-size,high-power laser coatings required for large-scale laser facilities mainly include antireflection coatings,high reflection coatings,polarizer coatings,and beam splitter coatings.Typical high-power laser coatings should exhibit specific spectral characteristics to satisfy beam transmission requirements,low stress to achieve excellent wavefront quality,and high laser-induced damage threshold(LIDT)to ensure the safe and stable operation of these high-power laser facilities.Among the available coating deposition technologies,electron-beam evaporation deposition is the most commonly used method to prepare coatings for nanosecond laser applications.It offers the advantages of high LIDT,good thickness uniformity,and easy production of large-size optics.Progress This paper briefly introduces the progress of work related to large-size,high-power laser coatings.Furthermore,the main progress of our research group in recent years with respect to key properties,including thickness control,stress control,laserinduced damage mechanism,and methods to improve the LIDT,is presented.In terms of coating thickness control,an improved optical monitoring strategy using multiple pieces of witness glass was proposed.To reduce thickness errors,some thick layers were split into two layers and monitored with different witness glasses.Each witness glass was monitored via a wavelength selected based on the required thickness tolerance.The proposed monitoring strategy is suitable for quarter-wavelength and non-quarter-wavelength multilayer coatings and can obtain spectral performance close to the theoretical value.A model of coating thickness distribution correction wa

关 键 词：激光薄膜 高功率激光 光谱性能 膜层应力 激光损伤阈值 

分 类 号：O484.1[理学—固体物理]