连续激光色谱合束高陡度薄膜设计及制备  

Design and Preparation of Ultra⁃Steep Dichroic Coating for Continuous Laser Beam Combination

作　　者：陆叶盛 王胭脂[1] 陈宇[1] 朱晔新 邵建达[1] Lu Yehsheng;Wang Yanzhi;Chen Yu;Zhu Yexin;Shao Jianda(Thin Film Optics Laboratory,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院上海光学精密机械研究所薄膜光学实验室,上海201800

出　　处：《中国激光》2024年第11期474-479,共6页Chinese Journal of Lasers

基　　金：国家重点研发计划(2022YFB3605900);中国科学院青年创新促进会项目(Y2021072);中国博士后科学基金(2022M723268)。

摘　　要：基于高陡度双色膜的激光合束是在单路连续激光输出能量达到瓶颈时,实现更高功率激光输出的有效技术方案之一。从设计、精密制备、测试表征的角度系统性地分析了膜系结构的优化设计和精密制备策略,制备了具有更高陡度、反射率、透过率、吸收率等性能的高陡度双色膜。对比了法布里-珀罗腔叠加带通和反射带叠加长波通基础膜系结构在透过率、反射率、陡度等光谱性能和膜层电场分布方面的差异,反射带叠加长波通膜系结构更适用于高功率连续激光的低吸收传输。基于双离子束溅射薄膜沉积设备,采用加权宽光谱监控方法进行了制备,采用分光光度计对制备样品进行了测试,并根据测试结果进行了误差分析。制备的高陡度双色膜陡度达到8 nm,1060 nm和1080 nm激光的合束效率达到99%以上,合束输出7.16 kW连续激光180 s时,双色膜温升不超过4℃。Objective The high-power continuous laser is in urgent demand in military and industrial fields,and it is an important technical support for national defense and economic development.Because it is limited by nonlinear effects,mode instability,and other problems,the output power of single-mode fiber lasers has a specific limitation.To improve the output power of the laser,researchers have proposed a series of laser power enhancement technology routes,such as spectral combination and dichromatic combination.By combining multiple single-path lasers to output laser,higher laser power can be obtained while maintaining good beam quality.Therefore,the combination scheme becomes the key to realize ultra-high laser power output.The dichroic mirror combination technology scheme based on the spectral characteristics of the dichroic film has become one of the main technical routes for high-power continuous laser synthesis output owing to its advantages of stability,high combination efficiency,and easy integration at low cost.Because of the spectral characteristics of the dichromic film,it can simultaneously transmit and reflect two beams with different wavelengths,and by adjusting the incidence angles of the two beams,it can realize the coincidence of the transmitted and reflected beams to achieve the combining effect of two beams.In addition,the higher the transmittance and reflectivity at the transmission and reflection bands of the dichromic film,the smaller is the loss of laser energy in the beam combination process,and the higher is the achieved beam combination efficiency.Methods The differences in spectral properties,such as spectral transmittance,reflectance,and steepness,and the electric field distribution of the film layer between the Fabry-Perot cavity superposition and the long-wavelength-pass basic film structures are compared.The long-wavelength-pass film structure is more suitable for the high-power continuous laser low-absorption transmission.Based on the dual ion beam sputtering thin film deposition equipmen

关 键 词：连续激光 激光合束 高陡度 双色膜 精密制备 

分 类 号：O436[机械工程—光学工程]