薄膜铌酸锂片上集成多维复用光子器件(特邀)  

Thin Film Lithium Niobate On-Chip Integration of Multi-Dimensional Multiplexed Photonic Devices(Invited)

作　　者：田永辉 袁明瑞 秦士敬 李浩 王思璇 肖恢芙 Tian Yonghui;Yuan Mingrui;Qin Shijing;Li Hao;Wang Sixuan;Xiao Huifu(School of Physical Science and Technology,Lanzhou University,Lanzhou 730000,Gansu,China)

机构地区：[1]兰州大学物理科学与技术学院,甘肃兰州730000

出　　处：《激光与光电子学进展》2024年第11期29-49,共21页Laser & Optoelectronics Progress

基　　金：甘肃省自然科学基金重点项目(23JRRA1026);甘肃省自然科学基金在站博士后专项项目(23JRRA1126)。

摘　　要：铌酸锂(LiNbO_(3))材料因其优异的电光、声光和非线性光学特性,被视为实现高性能集成光电子芯片的理想材料平台。近年来,随着晶圆级绝缘衬底上的铌酸锂(LNOI)薄膜的成功制备和微纳加工技术的突破,LNOI平台在大规模高速光电子器件集成方面已展现出显著优势。在高速调制器等基础通信器件已成功利用光电子集成技术实现的基础上,通过多信道并行传输数据以扩展链路容量的先进多路复用技术也受到广泛关注。基于LNOI平台,多个复用维度的集成光子器件得以开发,旨在实现高速大容量光电子通信器件的单片集成。本文探讨了LNOI光波导以及近期报道的多维复用LNOI集成光子器件,包括波长、模式、偏振维度的光信号复用、调控等关键技术,介绍了器件的工作机制、设计原理和方法以及性能指标。最后,讨论了LNOI平台上多维复用集成光子器件面临的挑战和潜在解决方案。Due to their excellent electro-optic,acousto-optic,and nonlinear optical properties,lithium niobate(LiNbO_(3))materials are widely recognized as ideal platforms for developing high-performance integrated optoelectronic chips.In recent years,advancements in micro-nano processing technology and successful fabrication of wafer-scale lithium niobate on insulator(LNOI)thin films have led to substantial advantages in integrating large-scale high-speed optoelectronic device on the LNOI platform.With the successful realization of fundamental communication devices such as high-speed modulators that utilize optoelectronic integration technology,increased attention has been given to advanced multiplexing techniques that extend data capacity by transmitting multiple channels in parallel.In the LNOI platform,various integrated photonic devices based on multiple multiplexing dimensions have been developed with the aim of achieving monolithic integration of high-speed and large-capacity optoelectronic communication devices.This paper explores LNOI waveguides and recently reported multi-dimensional multiplexed LNOI integrated photonic devices,including key technologies such as optical signal multiplexing,manipulation,and control in wavelength,mode,and polarization dimensions.We also detail the working mechanisms,design principles,methods,and performance parameters of the devices.Finally,this paper discusses the current challenges and potential solutions for implementing multi-dimensional multiplexed integrated photonic devices in the LNOI platform.

关 键 词：集成光子器件 薄膜铌酸锂 光波导 多维复用 光互连 

分 类 号：TN256[电子电信—物理电子学]