薄膜铌酸锂光波导器件的研究进展(特邀)  

Progress of Optical Waveguide Devices in Thin Film Lithium Niobate(Invited)

作　　者：姚昊 王梦柯 邓佳瑶 孙宇哲 吴杰云 陈开鑫 Yao Hao;Wang Mengke;Deng Jiayao;Sun Yuzhe;Wu Jieyun;Chen Kaixin(School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 611731,Sichuan,China)

机构地区：[1]电子科技大学光电科学与工程学院,四川成都611731

出　　处：《激光与光电子学进展》2024年第11期174-185,共12页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62075027);国家重点研发计划项目(2021YFB2800100)。

摘　　要：铌酸锂材料因其宽的透明窗口、成熟的波导制作工艺,以及优异的电光效应,在过去几十年中被广泛应用于制作高性能光波导电光调制器与电光开关。近年来,随着高质量薄膜铌酸锂的商品化,研究人员又开发了多种高性能的薄膜铌酸锂光波导器件,这些器件的性能已经远远超过了传统块状铌酸锂波导器件。本文主要梳理了近年来薄膜铌酸锂平台上的光波导、光栅耦合器、边缘耦合器、电光调制器及可调谐滤波器的研究进展,简要讨论了现阶段薄膜铌酸锂光波导器件面临的挑战。Lithium niobate has been widely used in the fabrication of high-performance electro-optic waveguide modulators and switches in the past decades because of its wide transparent window,mature waveguide fabrication technologies,and remarkable electro-optic effect.In recent years,with the advent of high-quality commercialized thin film lithium niobate,a variety of high-performance thin film lithium niobate optical waveguide devices have been demonstrated experimentally,and the performance of these devices has far exceeded their counterpart fabricated with conventional bulk lithium niobite wafer.In this paper,the progress of optical waveguides,couplers,electro-optical modulators,and tunable filters on thin-film lithium niobate platforms in recent years are reviewed,and the challenges faced by thin-film lithium niobate waveguide devices are briefly discussed.

关 键 词：集成光学 薄膜铌酸锂 电光效应 光学滤波器 

分 类 号：TN256[电子电信—物理电子学]