基于x切薄膜铌酸锂平台的TM模弯曲波导(特邀)  

TM Mode Bending Waveguide Based on x-Cut Thin-Film Lithium Niobate(Invited)

作　　者：高天 甘然丰 陈斌[2] 余嘉扬 刘洁 郭昌建 陈楷旋 刘柳[2] Gao Tian;Gan Ranfeng;Chen Bin;Yu Jiayang;Liu Jie;Guo Changjian;Chen Kaixuan;Liu Liu(South China Academy of Advanced Optoelectronics,South China Normal University,Guangzhou 510631,Guangdong,China;College of Optical Science and Engineering,Zhejiang University,Hangzhou 310058,Zhejiang,China;School of Electronics and Information Technology,Sun Yat-Sen University,Guangzhou 510275,Guangdong,China)

机构地区：[1]华南师范大学华南先进光电子研究院,广东广州510631 [2]浙江大学光电科学与工程学院,浙江杭州310058 [3]中山大学电子与信息工程学院,广东广州510275

出　　处：《激光与光电子学进展》2024年第11期186-191,共6页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62135012,62105107);浙江省创新创业领军人才引进项目(2021R01001)。

摘　　要：由于x切薄膜铌酸锂光集成平台的各向异性,光波导TM模在弯曲过程中容易发生模式杂化并耦合到其他模式,对TM模的弯曲构成了挑战。以400 nm厚、半刻蚀的铌酸锂波导为例,分析了TM0模在不同波导宽度和传输方向下的模式杂化现象,并对其90°弯曲传输性能进行仿真。最终得出结论:在特定波导宽度区域(约1.7~2.15μm),TM0模在90°弯曲过程中不会与其他模式发生杂化;当波导宽度小于1.7μm(或大于2.15μm)时,TM0模会与TE1(或TE2)模发生耦合。该结论在实验中也得到了验证。本研究为薄膜铌酸锂波导TM模的弯曲提供了设计思路,可用于该平台偏振调控相关的光集成器件。Due to the anisotropy of the x-cut thin-film lithium niobate optical integration platform,the transverse magnetic(TM)mode of the optical waveguide is prone to mode hybridization and coupling to other modes during bending,posing a challenge to the bending of the TM mode.This article takes a 400 nm thick,semi-etched lithium niobate waveguide as an example to analyze the mode hybridization phenomenon of TM0 mode under different waveguide widths and transmission directions,and simulates its 90°bending transmission performance.The findings indicate that within a certain waveguide width range(approximately 1.7μm to 2.15μm),no mode hybridization occurs when bending the TM0 mode.However,for waveguide width lower than 1.7μm or higher than 2.15μm,coupling between the TM0 and TE1(or TE2)mode occurs.Experimental demonstrations further corroborate this conclusion.This study offers a design methodology for achieving TM mode bending in thin-film lithium niobate waveguides,with potential applications in polarization-control-related optical integrated devices on this platform.

关 键 词：集成光学 薄膜铌酸锂 弯曲波导 模式杂化 

分 类 号：TN256[电子电信—物理电子学]