多条薄膜铌酸锂波导热光移相器设计与性能对比  

Designs and Comparisons of Heater Configurations in Thermo-Optic Phase-Shifters Comprising Multiple Thin-Film Lithium Niobate Waveguides

作　　者：卢金龙 郝婷 李志浩 周赤 吉贵军 Lu Jinlong;Hao Ting;Li Zhihao;Zhou Dennis;Ji Guijun(School of Precision Instruments and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China;Advanced Fiber Resources(Zhuhai)Ltd.,Zhuhai 519080,Guangdong,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]珠海光库科技股份有限公司,广东珠海519080

出　　处：《激光与光电子学进展》2024年第11期199-205,共7页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2021YFB2800064,2023YFB2807200);珠海市产学研合作项目(ZH22017001210108PWC)。

摘　　要：通过多物理场模拟对比了不同加热电路时三条薄膜铌酸锂波导情况下热光移相器的温度分布、调制效率与瞬态响应。结果显示:薄膜铌酸锂热光移相器总阻值不变的情况下,在仅有一条位于中心波导正上方的加热电极时具有最高的热调制效率;采用多条离散分布的加热电阻经优化后可在调制效率基本不变的情况下获得更优的热串扰,尤其适用于多波导集成时的局部调制;三维多物理场模拟结果显示优异的热调制效率(约34 mW),且器件瞬态响应时间约为180μs。Using multi-physics simulations,this study compares the temperature distributions,modulation efficiencies,and transient responses of a thermo-optical phase-shifter across three thin-film lithium niobate(TFLN)waveguides equipped with different heating circuits.The results reveal that the TFLN thermo-optical phase-shifter exhibits optimal modulation efficiency when the heating circuit is installed directly above the central waveguide.Alternatively,heating circuits with multiple resistors yield similar modulation efficiencies with reduced thermal crosstalk,making them particularly suitable for localized modulation in scenarios necessitating the integration of multiple waveguides.Threedimensional multi-physics simulation results demonstrate a reasonable thermal modulation efficiency(approximately 34 mW)of the thermo-optical phase-shifter with a transient response time of approximately 180μs.

关 键 词：薄膜铌酸锂 热光移相器 多波导集成 多物理场模拟 

分 类 号：O436[机械工程—光学工程]