类金刚石碳剥离膜的制备及其寿命研究  

Preparation and Lifetime Research of Diamond-like Carbon Stripper Foil

作　　者：樊启文[1] 孟波[1] 王华[1] 张榕[1] FAN Qiwen;MENG Bo;WANG Hua;ZHANG Rong(China Institute of Atomic Energy,Beijing 102413,China)

机构地区：[1]中国原子能科学研究院核物理研究所,北京102413

出　　处：《原子核物理评论》2024年第1期491-497,共7页Nuclear Physics Review

基　　金：国防科技工业抗辐照应用技术创新中心创新基金资助项目(KFZC2021020201);国家自然科学基金资助项目(11205251)。

摘　　要：采用磁过滤阴极真空弧(FCVA)技术,结合交流碳弧(ACCA)技术和松弛技术,制备了~5μg/cm^(2)的自支撑类金刚石碳(DLC)剥离膜。采用XP2U电子天平测试DLC膜的均匀性。结果显示,在Φ100 mm范围内,DLC膜最大不均匀性为8.82%。采用扫描电子显微镜(SEM)、拉曼(Raman)谱仪和X光电子谱(XPS)仪测试分析DLC膜的微观结构。SEM图像显示,通过双90°过滤后的DLC膜表面光滑,基本不含液滴。Raman光谱显示,DLC膜为典型的非晶DLC膜。XPS能谱显示,DLC膜中的sp^(3)杂化键超过70%。通过北京HI-13串列加速器提供的系列重离子束测试研究DLC剥离膜的寿命。结果显示,松弛后的DLC剥离膜寿命约为松驰前的3倍;对于^(63)Cu^(-)和^(197)Au^(-)离子束(加速电压9 MV、低能端流强1μA),DLC剥离膜寿命分别为碳弧碳剥离膜寿命的4倍和13倍;对于^(107)Ag^(-)、^(70)Ge^(-)、^(48)Ti^(-)、^(28)Si^(-)和^(127)I^(-)离子束,DLC剥离膜寿命为碳弧碳剥离膜寿命的2.6~10.0倍,并且离子越重、束流越强,DLC剥离膜的寿命对比碳弧碳剥离膜寿命的优势就越大;DLC剥离膜寿命与基衬偏压有一定关系,目前的测试结果显示,随基衬偏压的加大,剥离膜寿命呈现先升高后降低的大概趋势,-400 V左右的基衬偏压下DLC剥离膜寿命最长。The diamond-like carbon(DLC)stripper foils with~5µg/cm^(2) in thickness were produced by using the composite technology of the filtered cathodic vacuum arc(FCVA)-alternating current carbon arc(ACCA)-relaxation technique.The uniformity of the DLC foils were measured by the XP2U balance.The results show that the maximum inhomongeneity of DLC foils in the range of Φ100 mm is 8.82%.The microstructure of the DLC foils were measured by the scanning electron microscopy(SEM),Raman spectroscopy and X-ray photoelectron spectroscopy(XPS).The SEM images show that the DLC foils are smooth,and contain hardly droplets through the double 90°filters.The Raman spectrum indicates that the DLC foils are amorphous carbon films.The X-ray photoelectron spectrum indicates the sp^(3) bonds of the DLC foils exceed 70%.The irradiation lifetimes of the DLC stripper foils were tested with the heavy ion beams at the Beijing HI-13 Tandem Accelerator.The results indicate that the lifetime of the DLC stripper foils after relaxation is~3 times of the DLC stripper foils before relaxation.The lifetime of DLC stripper foil is respectively 4 and 13 times of the carbon stripper foil for the 197Au−and 63Cu−ion beams(~9 MV,~1µA).The lifetime of DLC stripper foil is 2.6~10.0 times of the carbon stripper foil for the ^(107)Ag^(−)、^(70)Ge^(−)、^(48)Ti^(−)、^(28)Si^(−)and ^(127)I^(−)ion beams.The heavier ions and the stronger beam current,the longer lifetime of DLC stripper foil compared with that of carbon stripper foil.The lifetime of the DLC stripper foils is related to the substrate bias voltage,and increases at first and then decreases with the increasing of the substrate bias voltage.The lifetime reaches the peak value when the substrate bias voltage is−400 V.

关 键 词：类金刚石碳 剥离膜 松弛 寿命 

分 类 号：O484.1[理学—固体物理]