A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors  

作　　者：Xingchen Xiao Ting Mao Yingchao Shi Kui Zhou Jia Hao Yiting Yu 

机构地区：[1]Ningbo Institute of Northwestern Polytechnical University,College of Mechanical Engineering,Northwestern Polytechnical University,710072 Xi’an,China [2]Key Laboratory of Micro/Nano Systems for Aerospace(Ministry of Education),Shaanxi Province Key Laboratory of Micro and Nanoelectromechanical Systems,Northwestern Polytechnical University,710072 Xi’an,China

出　　处：《Microsystems & Nanoengineering》2024年第3期169-180,共12页微系统与纳米工程（英文）

基　　金：supported by the National Natural Science Foundation of China(51975483);Key Research Projects of Shaanxi Province(2020ZDLGY01-03);Natural Science Foundation of Ningbo Municipality(202003N4033).

摘　　要：As one of the most common spatial light modulators,linear micromirror arrays(MMAs)based on microelectromechanical system(MEMS)processes are currently utilized in many fields.However,two crucial challenges exist in the fabrication of such devices:the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual stress.To solve these issues,an innovative processing method assisted by temporary anchors is presented.This approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon film.Importantly,these temporary anchors are strategically placed within the primary etching areas,enabling easy removal without additional processing steps.As a result,we successfully achieved wafer-level,high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%.Demonstrating superior capabilities to those of original MMAs,our enhanced version boasts a total of 60 linear micromirror elements,each featuring a length-to-width ratio of 52.6,and the entire optical aperture measures 5 mm×6 mm.The linear MMA exhibits an optical deflection angle of 20.4°at 110 Vdc while maintaining exceptional deflection flatness and uniformity.This study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields,and the proposed MMA is promising as a replacement for digital micromirror devices(DMDs,by TI Corp.)in fields such as spectral imaging and optical communication.

关 键 词：MIRROR exceptional anodic 

分 类 号：TP36[自动化与计算机技术—计算机系统结构]