All-inorganic ultrathin high-sensitivity transparent temperature sensor based on a Mn-Co-Ni-O nanofilm  

作　　者：Yuanyuan Cui Mengwei Sun Changbo Liu Yuan Deng 

机构地区：[1]Research Institute for Frontier Science,Beihang University,Beijing 100191,China [2]School of Materials Science and Engineering,Beihang University,Beijing 100191,China [3]Key Laboratory of Intelligent Sensing Materials and Chip Integration Technology of Zhejiang Province,Hangzhou Innovation Institute of Beihang University,Hangzhou 310051,China

出　　处：《Microsystems & Nanoengineering》2024年第3期195-205,共11页微系统与纳米工程（英文）

基　　金：supported by the National Natural Science Foundation of China(NSFC)(62004009 for C.L.);the National Key Research and Development Program of China(Grant No.2018YFA0702100);the Zhejiang Provincial Key Research and Development Program of China(Grant Nos.2021C01026 and 2021C05002);the Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang(2020R01007);the Beijing Nova Program(20230484412).

摘　　要：The demand for optically transparent temperature sensors in intelligent devices is increasing.However,the performance of these sensors,particularly in terms of their sensitivity and resolution,must be further enhanced.This study introduces a novel transparent and highly sensitive temperature sensor characterized by its ultrathin,freestanding design based on a Mn-Co-Ni-O nanofilm.The Mn-Co-Ni-O-based sensor exhibits remarkable sensitivity,with a temperature coefficient of resistance of−4%℃^(−1),and can detect minuscule temperature fluctuations as small as 0.03℃.Additionally,the freestanding sensor can be transferred onto any substrate for versatile application while maintaining robust structural stability and excellent resistance to interference,indicating its suitability for operation in challenging environments.Its practical utility in monitoring the surface temperature of optical devices is demonstrated through vertical integration of the sensor and a micro light-emitting diode on a polyimide substrate.Moreover,an experiment in which the sensor is implanted in rats confirms its favorable biocompatibility,highlighting the promising applications of the sensor in the biomedical domain.

关 键 词：TRANSPARENT sensor VERSATILE 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]