流体在微小管径中的流量检测方法研究  

Research on Flow Measurement Method of Fluid in Micro-tube of Diameter

作　　者：王伟生[1] 冯启航 张孝远[1] 高岩 WANG Weisheng;FENG Qihang;ZHANG Xiaoyuan;GAO Yan(School of Electrical Engineering,Henan University of Technology;Henan Science Automation Engineering Technology Research Center)

机构地区：[1]河南工业大学电气工程学院 [2]河南省科学自动化工程技术研究中心

出　　处：《仪表技术与传感器》2024年第7期39-45,71,共8页Instrument Technique and Sensor

基　　金：河南省科技研发重点项目(225200810038);河南省自然科学基金项目(232300421207)。

摘　　要：随着国内半导体等精密制造业的发展,对于微小管径的计量需求不断增加。为弥补国内在微小管径的流量计量方面的不足,提出一种与温度无关的超声波测量微小管径的液体流量计设计方法。首先,阐述了超声波测量流量的原理,详细解释了基于超声信号特征点计算飞行时间的方法,然后根据测量精度要求保证了信号时序的同步,通过以STM32控制器为核心的样机实现了流量数据的实时测量,最后,搭建测量实验平台,验证该方法的有效性。以DN4管道进行液体流量检测实验,实验结果表明流量范围为5~50 mL/min时,测量相对误差均在2.0%以内,流量范围为50~800 mL/min时,测量相对误差均在1.5%以内,满足工业生产要求,具有较好的实用性。As the growth of precision manufacturing industries such as semiconductor at home,the measurement demanding for micro-tube of diameters is increasingly.To fill the gap in the flow measurement of micro-tube diameters at home,a temperature-independent ultrasonic measurement design for liquid flow meter for micro-tube diameter was proposed.Firstly,the design explained the principle of ultrasonic flow measurement and the method of calculating flight time based on ultrasonic signal characteristics in detail.Secondly,the synchronization of the signal timing was ensured according to the measurement accuracy requirements.Through a prototype with the STM32 controller as its core,the real-time measurement of flow data was achieved.Finally,the measurement experiment platform was established to verify the effectiveness of this design method.The experimental results indicate that when measuring liquid through a DN4 pipeline,the relative error is within 2.0%for measurements when the flow rate range is between 5 mL/min and 50 mL/min and within 1.5%for measurements when the flow rate range is between 50 mL/min and 800 mL/min,which meets the industrial production requirements and has good practicality.

关 键 词：微小管径 超声波测量 嵌入式系统 

分 类 号：TH89[机械工程—仪器科学与技术]