离子发动机栅极材料差分溅射产额分布特性仿真  

Simulation on the distribution characteristics of differential sputtering yields on ion engine grid materials

作　　者：朱政羲 苗龙 耿海[3] 郭德洲 杨统勋 何梓豪 王宁飞[1] ZHU Zhengxi;MIAO Long;GENG Hai;GUO Dezhou;YANG Tongxun;HE Zihao;WANG Ningfei(School of Aerospace Engineering,Beijing Institute of Technology,Beijing 100081,China;Chongqing Innovation Center,Beijing Institute of Technology,Chongqing 404100,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]北京理工大学宇航学院,北京100081 [2]北京理工大学重庆创新中心,重庆404100 [3]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《航天器环境工程》2024年第4期450-458,共9页Spacecraft Environment Engineering

基　　金：国家重点研发计划项目(编号:2022YFB3403500);国家自然科学基金项目(编号:52202460)。

摘　　要：针对离子发动机栅极溅射原子空间分布不明确导致栅极腐蚀模型预测偏差大的问题,采用SDTrimSP程序模拟离子轰击栅极材料的溅射过程;系统研究离子入射能量、入射角度以及离子种类对钼栅极材料差分溅射产额的影响。发现正入射条件下的差分溅射产额仿真结果与实验具有较好的一致性。重点关注斜入射条件下差分溅射产额在不同方位角下的分布轮廓,并通过Modified-Zhang公式对差分溅射产额进行拟合,以拟合结果作为材料边界条件输入溅射腐蚀—再沉积模型,较为真实地模拟了栅极材料的腐蚀过程。以上研究可为离子发动机栅极组件腐蚀形貌的精确预测提供参考。In view of the unclear spatial distributions of sputtered atoms from ion engine grid,which leads to significant deviations in grid erosion modeling predictions,the SDTrimSP program was used to simulate the sputtering process of ions bombarding the grid materials.The study systematically investigated the impact of ion incident energy,incident angle,and ion species on the differential sputtering yields of molybdenum grid materials.Under normal incidence,the simulated differential sputtering yields were found to be in good agreement with experimental data.Special attention was given to the distribution profiles of differential sputtering yields at different azimuthal angles under oblique incidence.The Modified-Zhang formula was used to fit the differential sputtering yields.The fitting results were applied as material boundary conditions in the erosion-redeposition model,offering a more realistic simulation of the grid materials’erosion process.This approach may provide a reference for the accurate prediction of the erosion morphology of ion engine grid components.

关 键 词：离子发动机 钼栅极材料 差分溅射产额 斜入射 腐蚀—再沉积模型 

分 类 号：V439[航空宇航科学与技术—航空宇航推进理论与工程]