光学压力计的标定及应用  

Calibration and Application of Optical Manometer

作　　者：聂中梁 王新广 王进 杨远超[4] 胡常乐 孙羽 胡水明 NIE Zhongliang;WANG Xinguang;WANG Jin;YANG Yuanchao;HU Changle;SUN Yu;HU Shuiming(Hefei National Research Center of Physical Sciences at the Microscale,University of Science and Technology of China,Hefei 230026,China;Department of Chemical Physics,University of Science and Technology of China,Hefei 230026,China;Institute of Advanced Science Facilities,Shenzhen 518107,Guangdong,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国科学技术大学合肥微尺度物质科学国家研究中心,合肥230026 [2]中国科学技术大学化学物理系,合肥230026 [3]深圳综合粒子设施研究院,广东深圳518107 [4]中国计量科学研究院,北京100029

出　　处：《真空与低温》2024年第5期467-472,共6页Vacuum and Cryogenics

基　　金：中国科学院先导科技专项(XDC07010000);中央高校基本科研业务费专项资金(WK9990000105)。

摘　　要：搭建了基于光学谐振腔的气体压力测量装置,即光学压力计。使用测量不确定度为0.001 1%(k=1)的活塞压力计,对两套独立的光学压力计进行标定,并对光学压力计的测量不确定度进行了系统的分析与评定,最终得到其压力测量的合成标准不确定度。利用该光学压力计对一台标称测量不确定度为0.025%的商用电容薄膜真空计进行多次校准。结果表明,在校准后的1年时间内,该薄膜压力计电容薄膜真空计的测量不确定度可达0.003%,大幅度提高了该商用电容薄膜真空计的测量不确定度。该光学压力计具有较好的长期稳定性,可应用于校准各种商用压力计,提高实际测量不确定度。We developed an instrument for gas pressure calibration based on optical resonance cavities,the so-called op-tical pressure gauge.Two independent optical pressure gauges were calibrated by a piston pressure gauge with a stated uncer-tainty of 0.0011%(k=1).The uncertainty budget of the optical pressure gauge was systematically analyzed,and the overall uncertainty of the system was obtained.The optical pressure gauge was used to calibrate a commercial capacitance di-aphragm gauge with a stated uncertainty of 0.025%several times during a period over one year.The results show that the un-certainty can reach 0.003%within one year after calibration.The results demonstrate the use of the optical gauge in calibrat-ing commercial gauges with high accuracy,and also indicate a good long-term stability of the optical pressure gauge.The in-strument therefore can be applied to calibrate various commercial pressure gauges to improve the uncertainty of actual mea-surement.

关 键 词：真空计量 压力计 Fabry-Perot腔 气体折射率 

分 类 号：TB772[一般工业技术—真空技术]