面内传播方向对SAW滤波器性能的影响研究  

Influence of In-Plane Propagation Direction on the Performance of Surface Acoustic Wave Filters

作　　者：朱建宇 魏子杰[2,3] 范维[2,3] 李沛然 钱一聪 帅垚[2,3] 吴传贵[2,3] 罗文博[2,3] 潘忻强[2,3] 张万里[2,3] ZHU Jianyu;WEI Zijie;FAN Wei;LI Peiran;QIAN Yicong;SHUAI Yao;WU Chuangui;LUO Wenbo;PAN Xinqiang;ZHANG Wanli(School of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065,China;Chongqing Microelectronics Industry Technology Research Institute,University of Electronic Science and Technology of China,Chongqing 401332,China;School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]重庆邮电大学光电工程学院,重庆400065 [2]电子科技大学重庆微电子产业技术研究院,重庆401332 [3]电子科技大学电子科学与工程学院,四川成都611731

出　　处：《压电与声光》2024年第4期435-438,共4页Piezoelectrics & Acoustooptics

基　　金：四川省科技计划基金资助项目(2020YFJO02)。

摘　　要：为了满足窄带声表面波滤波器对品质因数Q值和带外抑制日益增长的需求,提出了一种窄带滤波器设计方法。在基于新型POI结构谐振器的基础上,通过旋转谐振器达到改变波传播角度的目的,并利用二维全模型得到准确的实验数据,与原结构谐振器分别代入滤波器设计中进行比较。实验结果表明,该方法在一定程度上能够有效地增加带外抑制,对过渡带抑制能力有2~4 dB的提升,且具有设计简便,占用空间小等优点。To meet the increasing demand for Q-value and out-of-band suppression in narrowband surface acoustic wave filters,this paper proposes a design method based on a new type of piezo on insulator(POI) structure resonator.The purpose of changing the wave propagation angle is achieved by rotating the resonator,and accurate experimental data are obtained using a two-dimensional full model,which is compared with the original structure resonator in the filter design.The experimental results show that this method can effectively increase out-of-band suppression,with a 2-4 dB improvement in transition band suppression ability.Additionally,the design is simple and requires little space.

关 键 词：声表面波(SAW) 窄带 谐振器 带外抑制 压电材料 

分 类 号：TN384[电子电信—物理电子学]