一种高密度压电变形镜驱动电源的设计  

Design of a High-Density Piezoelectric Deformable Mirror Driving Power Supply

作　　者：徐兴 邵蒙 李洪文[1] XU Xing;SHAO Meng;LI Hongwen(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2024年第4期491-495,504,共6页Piezoelectrics & Acoustooptics

基　　金：天文联合基金资助项目(No.U2031126);吉林省科技发展计划基金资助项目(No.20230203113SF)。

摘　　要：压电变形镜是自适应光学系统的执行机构。针对压电变形镜高精度、高动态应用的问题,设计了一款新型的压电陶瓷驱动电源,同时采取线性校正网络确保了放大电路的稳定性,并对影响输出精确度及非线性失真的原因进行了分析。实验结果表明,当驱动容性负载为0.33μF时,该驱动电源的大信号带宽可达3 kHz,阶跃响应的上升时间优于80μs,下降时间优于130μs,输出线性度为99.6%。Piezoelectric deformable mirror is used as an actuator for adaptive optics system.In this study,a novel piezoelectric ceramic driving power supply is designed for high-precision and highly dynamic application of piezoelectric deformable mirror.The design adopts the linear correction network to ensure the stability of the amplification circuit.Furthermore,the reasons that affect the output accuracy and nonlinear distortion are analyzed.The experimental results show that when driving a capacitive load of 0.33 μF,the drive power supply exhibits a large signal bandwidth of up to 3 kHz,rise time of the step response greater than 80 μs,fall time greater than 130 μs,and output linearity of 99.6%.

关 键 词：压电陶瓷 驱动电源 压电变形镜 相位补偿 容性负载 

分 类 号：TN384[电子电信—物理电子学] TN72