基于COM-MBVD混合模型的多模态声学响应研究与仿真  

Research and Simulation of Multi-Modal Acoustic Response Based on COM-MBVD Hybrid Modeling

作　　者：周艺蒙 陈抒键 蒋冠臻 范维[3] 魏子杰[3] 李沛然 帅垚[2,3] 吴传贵[2,3] 罗文博[2,3] 潘忻强[2,3] 张万里[2,3] ZHOU Yimeng;CHEN Shujian;JIANG Guanzhen;FAN Wei;WEI Zijie;LI Peiran;SHUAI Yao;WU Chuangui;LUO Wenbo;PAN Xinqiang;ZHANG Wanli(College of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065,China;Chongqing Institute of Microelectronics Industry Technology,University of Electronics Science and Technology of China,Chongqing 401332,China;School of Electronics Science and Engineering,University of Electronics Science and Technology of China,Chengdu 611731,China)

机构地区：[1]重庆邮电大学光电工程学院,重庆400065 [2]电子科技大学重庆微电子产业技术研究院,重庆401332 [3]电子科技大学电子科学与工程学院,四川成都611731

出　　处：《压电与声光》2024年第4期519-523,共5页Piezoelectrics & Acoustooptics

基　　金：四川省科技计划基金资助项目(2020YFJ0002)。

摘　　要：耦合模(COM)模型广泛应用于声表面波(SAW)滤波器设计中,传统的单模COM模型不能拟合到远端的高阶水平剪切波、西沙瓦波等杂散模态。从单模COM模型出发,结合类似于MBVD等效电路的谐振支路,实现COM-MBVD模型拟合多模态声学响应。并基于此模型搭建8阶梯形结构电路进行优化仿真。最终设计出中心频率为1 590 MHz,通带插入损耗小于1.6 dB,带内波动为1 dB,带宽为80 MHz(相对带宽为5%)的声表面波(SAW)滤波器。实际测试数据与仿真数据相符,验证了该设计方法的可行性。The coupling-of-modes(COM) model is extensively used in the design of surface acoustic wave(SAW) filters.However,the conventional single-mode COM model is insufficient for accounting for spurious modes,such as higher-order horizontal shear waves and Sezawa waves at the far end.In this study,we first used the single-mode COM model and integrated it with a resonant branch similar to the MBVD equivalent circuit to establish the COM-MBVD model for accommodating the multi-modal acoustic response.Subsequently,an 8th-order ladder structure circuit was constructed for optimization simulation,following this model.The final configuration resulted in a SAW filter with a central frequency of 1 590 MHz,a passband insertion loss below 1.6 dB,an in-band fluctuation of 1 dB,and a bandwidth of 80 MHz(equivalent to a relative bandwidth of 5%).The alignment between the test and simulation data confirms the viability of the design approach.

关 键 词：COM模型 MBVD模型 梯形结构 SAW滤波器 

分 类 号：TN384[电子电信—物理电子学]