MEMS压电矢量水听器低噪声前置放大电路  

Low-Noise Preamplifier Circuit for MEMS Piezoelectric Vector Hydrophone

作　　者：邓威 樊青青 李俊红[1] 马军[1] 孔超[1] DENG Wei;FAN Qingqing;LI Junhong;MA Jun;KONG Chao(State Key Laboratory of Acoustics,Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院声学研究所声场声信息国家重点实验室,北京100190 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2024年第4期550-554,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(12174420,11874388);中国科学院声学研究所自主部署“目标导向”类项目(MBDX202112);“前沿探索”类项目(QYTS202002)。

摘　　要：等效自噪声是微机电系统(MEMS)压电矢量水听器重要的性能指标,前置放大电路的噪声是其主要来源之一。为降低MEMS压电矢量水听器的自噪声,设计了一种低噪声前置放大电路。采用双JFET并联电路结构,辅以合适的偏置电路,对不同噪声源进行理论分析,优化电路参数,最终实现了噪声性能较优的低噪声前置放大电路的设计与制备。测试结果表明,在MEMS压电矢量水听器的工作频带内,低噪声前置放大电路信号放大无失真,电压增益为43.8d B,等效输入噪声电压谱密度为0.7nV√Hz@1 kHz其噪声性能较国内外同类型的放大电路具有一定优势。Equivalent self-noise is an important performance indicator for micro-electromechanical systems consideration.(MEMS)hydrophones,piezoelectric vector the and the noise of the preamplifier circuit is an important of This study entailed design of a low-noise preamplifier circuit to reduce the self-noise MEMS piezoelectric vecand(JFETs)tor hydrophones.By using a circuit structure with dual junction field-effect transistors different in parallel conducted supto circuits,bias plementing it with appropriate parameters.a theoretical analysis of low-noise noise sources was with optinoise mize the circuit The design and fabrication of a preamplifier circuit superior perMEMS that,show formance were ultimately achieved.The test results within the operating frequency band of the hydrophone,distortion,piezoelectric vector43.8the low-noise preamplifier circuit amplifies signals without with a voltnoise age gain of d Band an equivalent input noise voltage spectral density of 0.7nV√Hz@1 kHz.This performance provides evident advantages over similar amplification circuits domestically and internationally.

关 键 词：等效自噪声 MEMS压电矢量水听器 前置放大电路 1/f噪声 噪声电压谱密度 

分 类 号：TN384[电子电信—物理电子学] TN929.3