Polarization Band Effect and MEMS-Based Plasma Generation  

作　　者：Henggao Ding Zhongyu Hou 

机构地区：[1]Equipment Development Department,Beijing 100034,China [2]National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Shanghai Jiao Tong University,Shanghai 200240,China

出　　处：《Instrumentation》2024年第2期1-8,共8页仪器仪表学报（英文版）

基　　金：supported by the National Natural Science Foundationof China(60906053,61204069,61274118,61306144,61504079,and 11605112);Scientific and Innovative Action Plan of Shanghai(15DZ1160800 and 17XD1702400);National Key Research&Development(R&D)Program of China(Grant No.SQ2023YFC2600062).

摘　　要：We find that effects resulting from micro/nano scale structures can regulate space charges which excite and lead to the special electric field distribution featuring the flux convergence band structure. It is here referred to as the polarization band effect, which stems from the specific field-induced interactions among atoms and molecules. The micro/nanoelectrode array structures were designed and fabricated using the non-silicon micro/nano processing technology, forming micro/nano electrode arrays-based plasma microelectromechanical systems(NPMEMS). The integrated NPMEMS device can be used to regulate the inner energy states of matters and generate plasma based on the polarization band effect, all within a single chip-size limited local area or extending into a large volume space with the deployment of a distributed array of multiple devices. Its special physical and chemical properties can be utilized to greatly improve the efficiency of potential application systems or solve mechanism-level challenges in plasma-related applications of multiple fields.

关 键 词：polarization band effect MEMS micro/nanoelectrode array PLASMA 

分 类 号：TH-39[机械工程]