Low palladium content CeO_(2)/ZnO composite for acetone sensor with sub-second response prepared by ultrasonic method  

低钯含量CeO_(2)/ZnO的超声法制备及其构建亚秒级丙酮传感器的研究

作　　者：CHEN Xu-jie XING Qiao-ling TANG Xuan CAI Yong ZHANG Ming 陈徐倢;幸巧玲;唐轩;蔡勇;张明(Hunan Provincial Key Laboratory of Low-dimensional Structural Physics&Devices,School of Physics and Electronics,Hunan University,Changsha 410082,China;Changsha Semiconductor Technology and Application Innovation Research Institute,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China;School of Mechanical Engineering and Mechanics,Xiangtan University,Xiangtan 411105,China;Research Institute of Hunan University in Chongqing,Chongqing 401120,China;Engineering Research Center of Advanced Semiconductor Technology and Application of Ministry of Education&Key Laboratory for Micro-/Nano-Optoelectronic Devices of Ministry of Education,National Key Laboratory of Power Semiconductor and Integration Technology,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China)

机构地区：[1]Hunan Provincial Key Laboratory of Low-dimensional Structural Physics&Devices,School of Physics and Electronics,Hunan University,Changsha 410082,China [2]Changsha Semiconductor Technology and Application Innovation Research Institute,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China [3]School of Mechanical Engineering and Mechanics,Xiangtan University,Xiangtan 411105,China [4]Research Institute of Hunan University in Chongqing,Chongqing 401120,China [5]Engineering Research Center of Advanced Semiconductor Technology and Application of Ministry of Education&Key Laboratory for Micro-/Nano-Optoelectronic Devices of Ministry of Education,National Key Laboratory of Power Semiconductor and Integration Technology,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China

出　　处：《Journal of Central South University》2024年第7期2137-2149,共13页中南大学学报（英文版）

基　　金：Project(2023JJ10005)supported by the Natural Science Foundation of Hunan Province,China;Projects(51772082,51804106)supported by the National Natural Science Foundation of China。

摘　　要：In practical applications,noble metal doping is often used to prepare high performance gas sensors,but more noble metal doping will lead to higher preparation costs.In this study,CeO_(2)/ZnO-Pd with low palladium content was prepared by ultrasonic method with fast response and high selectivity for acetone sensing.With the same amount of palladium added,the selectivity coefficient of CeO_(2)/ZnO-Pd is 1.88 times higher than that of the stirred sensor.Compared with the pure PdO-doped CeO_(2)/ZnO-PdO material,the content of Pd in CeO_(2)/ZnO-PdO is about 30%of that in CeO_(2)/ZnO-PdO,but the selectivity coefficient for acetone is 2.56 times higher.The CeO_(2)/ZnO-Pd sensor has a higher response(22.54)to 50×10^(−6) acetone at 300℃and the selectivity coefficient is 2.57 times that of the CeO_(2)/ZnO sensor.The sensor has a sub-second response time(0.6 s)and still has a 2.36 response to 330×10^(−9) of acetone.Ultrasonic doping makes Pd particles smaller and increases the contact area with gas.Meanwhile,the composition of n-p-n heterojunction and the synergistic effect of Pd/PdO improve the sensor performance.It shows that ultrasonic Pd doping provides a way to improve the utilization rate of doped metals and prepare highly selective gas sensors.在实际应用中,常使用贵金属掺杂制备高性能气体传感器,但是掺杂较高含量贵金属会导致制备成本提高。为此,本研究采用超声辅助和静电纺丝合成了低钯含量的CeO_(2)/ZnO-Pd丙酮传感器,该传感器具有快速响应和对丙酮的高选择性。在相同的钯添加量的情况下,使用超声法掺杂比搅拌法制备的传感器选择性系数提升了1.88倍。与纯PdO掺杂的CeO_(2)/ZnO-PdO材料相比,CeO_(2)/ZnO-Pd中Pd的含量约为CeO_(2)/ZnO-PdO的30%,但对丙酮的选择性系数提高了2.56倍。实验结果表明,在300℃条件下CeO_(2)/ZnO-Pd传感器对50×10^(−6)丙酮有较高的响应(22.54),选择性系数是CeO_(2)/ZnO传感器的2.57倍。同时,该传感器具有亚秒级的响应时间(0.6 s),且对330×10^(−9)的丙酮仍然有2.36的响应。传感器性能提高可以归因于超声法掺杂使得Pd颗粒更小从而增加了Pd与气体接触面积,CeO_(2)/ZnO-Pd中npn异质结的构成,以及Pd/PdO的协同作用。这表明超声掺杂Pd为提高掺杂金属的利用率和制备高选择性气体传感器提供了思路。

关 键 词：low palladium sub-second responce ultrasonic method acetone sensor heterojunction 

分 类 号：TB381[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]