一种高导电性、高分辨率和高耐用性织物电路制备工艺  

A process for preparing fabric circuits with high conductivity,resolution,and durability

作　　者：陈瑶 陈远汾 许珂 CHEN Yao;CHEN Yuanfen;XU Ke(School of Mechanical Engineering,Guangxi University,Nanning530004,China)

机构地区：[1]广西大学机械工程学院,广西南宁530004

出　　处：《电子元件与材料》2024年第7期796-803,共8页Electronic Components And Materials

基　　金：广西高校“百人计划”(T3010097923)。

摘　　要：可穿戴设备已成为一种用于长期、连续监测生理电信号的重要手段,然而开发具备良好舒适性、高效导电性及长期稳定性的柔性电路仍面临显著挑战。为了促进可穿戴设备的发展,该研究提出一种织物电路制备工艺,该工艺通过磁控溅射将铜沉积在图案化的聚酰亚胺(PI)/织物基底上,然后在铜的表面蒸镀派瑞林薄膜作为保护。图案化的PI薄膜不仅有利于铜的沉积,而且保持织物的透气性。该工艺可以制备最小线宽为0.4 mm的导线,织物导线的电阻率为8.25×10^(-7)Ω·m;经过1000次弯曲实验,织物导线的电阻增长率约55.72%;经过10次洗涤后,电阻增加47.04%。该研究可以在织物上制备高导电性、抗疲劳、可洗涤和高分辨率的柔性电路,使生理电信号采集电路可以集成到衣服表面。The wearable devices have become an important approach for long-term and continuous monitoring of physiological electrical signals.However,developing a flexible circuit with excellent comfort,efficient conductivity,and long-term stability faces significant challenges.In order to promote the development of the wearable devices,a process for fabric circuit preparing was proposed.Copper was magnetron sputtered onto the patterned PI/fabric substrate,then covered by a protective Parylene film.The patterned PI film facilitates the deposition of copper,while maintaining air permeability of the fabric.This process can prepare fabric wires with 0.4 mm minimum line width,and the resistivity of wire is 8.25×10^(-7)Ω·m;After 1000 bending cycles,the resistance change of the fabric wire is about 55.72%;After 10 washing tests,the resistance change is approximately 47.04%.This study provides a way to fabricate highly conductive,fatigue resistant,washable,and high-resolution flexible circuits on the fabric,enables the integration of the physiological electrical signal acquisition circuitry into the surface of clothing.

关 键 词：可穿戴设备 图案化 磁控溅射 织物电路 抗疲劳 可洗涤 高分辨率 

分 类 号：TN44[电子电信—微电子学与固体电子学]