宽带滤波器传输线法去嵌的研究  

Research on the de-embedding of broadband filter transmission line method

作　　者：周艺蒙 帅垚[2,3] 胡月 吴传贵[2,3] 张万里[2,3] ZHOU Yimeng;SHUAI Yao;HU Yue;WU Chuangui;ZHANG Wanli(School of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing400065,China;State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu610054,China;Chongqing Institute of Microelectronics Industry Technology,UESTC,Chongqing401332,China)

机构地区：[1]重庆邮电大学光电工程学院,重庆400065 [2]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054 [3]电子科技大学重庆微电子产业技术研究院,重庆401332

出　　处：《电子元件与材料》2024年第7期866-871,共6页Electronic Components And Materials

基　　金：四川省科技计划基金资助项目(2020YF0002)。

摘　　要：为准确获取谐振器材料参数,采用开路短路法、集总参数法、传输线法三种方法分别对谐振器进行去嵌,并分析去嵌对滤波器产生的影响。其中传输线法去嵌无需流片,仿真即可得出谐振器测试结构的寄生参数。采用传输线法对串联、并联谐振去嵌,并运用去嵌后的谐振器材料参数搭建滤波器,滤波器采用九阶π型电路拓扑结构,其带宽为160 MHz,阻带抑制为-25 dB。证实谐振器的测试结构对宽带声表面波滤波器带宽、阻带和零点造成影响,使得去嵌后的滤波器左侧零点向低频偏移,低频抑制上升,高频抑制下降,通带插入损耗增加。Various methods were used to de-embed the resonator and analyze the effect of de-embedding on the filter to obtain accurate material parameters of the resonator.Three methods were used to de-embed the resonator,namely,the opencircuit short-circuit method,the lumped-parameter method,and the transmission line method.Among them,the transmission line method does not require tapeout,and parasitic parameters of the resonator can be derived from simulation.The series and shunt resonators were de-embedded by the transmission line method,and the filter was constructed by using the material parameters of the de-embedded resonator.The filter adopts a ninth-orderπ-circuit topology with a bandwidth of 160 MHz and a rejection of-25 dB.It is demonstrated that the test structure of the resonator could affect the bandwidth,the stopband,and the zero point of the broadband SAW filter.After de-embedding,the zero point of the left side of the deembedded filter shifts towards lower frequency,and the low-frequency rejection increases,and the high-frequency rejection decreases,and the passband insertion loss increases.

关 键 词：去嵌 开路短路法 集总参数法 传输线法 宽带滤波器 π型电路拓扑结构 

分 类 号：TN384[电子电信—物理电子学]