计算全息检测技术的精度溯源研究现状分析(内封面文章)  

Analysis of the current status of research on accuracy traceability based on computational holographic detection technology(inner cover paper)

作　　者：李佳[1,2,3,4] 程强 王孝坤[1,2,3,4] 胡海翔[1,2,3,4] 李龙响 李洪士[1,2,3,4] 薛栋林 张学军[1,2] LI Jia;CHENG Qiang;WANG Xiaokun;HU Haixiang;LI Longxiang;LI Hongshi;XUE Donglin;ZHANG Xuejun(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;State Key Laboratory of Applied Optics,Changchun 130033,China;Key Laboratory of Advanced Manufacturing for Optical Systems,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049 [3]应用光学国家重点实验室,吉林长春130033 [4]光学系统先进制造重点实验室(中国科学院),吉林长春130033

出　　处：《红外与激光工程》2024年第8期140-154,共15页Infrared and Laser Engineering

基　　金：国家重点研发计划项目(2022YFB3403404);国家自然科学基金项目(62127901,12003034,62305334);中国科学院青年创新促进会资助项目(2022213)。

摘　　要：随着光学系统性能的要求越来越高,非球面、自由曲面等复杂光学曲面能够提升系统的成像性能,因此提升复杂光学曲面的检测精度极为重要。干涉检测是测量复杂光学曲面的重要手段,其中计算全息检测法(Computer Generated Hologram,CGH)作为干涉检测中的一种,因其精度高和设计自由度大等优点得到了广泛的应用。但是在CGH检测复杂曲面的过程中存在的各类误差会影响波前检测的精度。文中首先介绍了计算全息法的检测精度现状,其次归纳总结了造成计算全息法误差的主要因素。分别介绍了不同误差的产生原理、影响效果、相对应标定补偿方法及适用情景和优缺点;并介绍了基于CGH占空比与线条位置误差的调研现状分析以及现有的研究方法;最后对计算全息法检测的精度溯源和精度提升研究趋势进行了展望。Significance As the performance of optical systems is becoming more and more demanding,complex optical surfaces such as aspheres and free-form surfaces can improve the imaging performance of the system,so it is extremely important to improve the detection accuracy of complex optical surfaces.Interference detection is an important means of measuring complex optical surfaces,and Computer Generated Holograms(CGH),as one of the interferometric detection methods,has been widely used due to its high accuracy and large degree of design freedom.However,the various types of errors existing in the process of CGH detection of complex surfaces will affect the accuracy of wavefront detection.The significance of Computer-Generated Holograms(CGH)in optical surface metrology lies in its transformative potential to achieve unparalleled precision and efficiency in measuring complex surface profiles.Traditional metrology methods often face limitations in accuracy and versatility,particularly when dealing with intricate geometries and microscopic features.In contrast,CGH offers a noncontact,high-resolution approach that promises to revolutionize metrology across various industries,including semiconductor manufacturing,aerospace engineering,and biomedical sciences.Progress In the development of Computer Generated Holograms(CGH)technology,the study and management of errors play a crucial role.CGH technology is capable of high-precision surface measurements and morphology reconstruction by utilising the principles of computational optics.However,how to effectively identify,understand and minimise errors is crucial to ensure measurement accuracy.In recent years,researchers have focused on addressing the various sources of error that can exist in CGH systems,which include,but are not limited to,non-uniformities in the optical system,environmental factors(e.g.,vibration and temperature variations),and the accuracy of the algorithms themselves.Through systematic error analyses and corrections(Fig.2),researchers have continued to improve th

关 键 词：计算全息图 复杂曲面检测 计算全息图精度溯源 误差分析 

分 类 号：O436.1[机械工程—光学工程]