高精度光谱特性测试与表征系统  

High-precision spectral characteristic measurement andcharacterization system

作　　者：姜洪妍 孙兵[2] 陈德应[3] 季一勤[1,3] 王天鹤 樊荣伟 JIANG Hongyan;SUN Bing;CHEN Deying;JI Yiqin;WANG Tianhe;FAN Rongwei(Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China;Academy of Opto-Electronics,China Electronics Technology Group Corporation,Tianjin 300308,China;School of Astronautics,Harbin Institute of Technology,Harbin 150080,China)

机构地区：[1]天津津航技术物理研究所,天津300308 [2]中国电子科技集团公司光电研究院,天津300308 [3]哈尔滨工业大学航天学院,黑龙江哈尔滨150080

出　　处：《红外与激光工程》2024年第8期164-170,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62192774,62305085)。

摘　　要：针对分光光度计存在发散角而导致窄带滤波器测试存在误差的问题,研制了高精度光谱特性测试与表征系统。分析了光束入射的锥角效应以及发散角对窄带滤波器中心波长、峰值透过率和半高宽的影响。利用发散角小的激光光束作为光源,搭建了高精度光谱特性测试与表征方案,完成了窄带滤波器的精确光谱特性测试及表征。通过对中心波长532 nm窄带滤波器的制备和测试,验证了系统的实用性。测试窄带滤波器的半高宽为0.79 nm,峰值透过率为87.23%。对比5°和10°下的光谱透过率曲线,验证了角度对窄带滤波器的影响。高精度光谱特性测试与表征系统有效实现了窄带滤波器的高精度测试。Objective Spectral characterization testing is a key step in the thin film preparation process.Through this testing,the optical properties of the thin film can be determined,providing important foundations for optimizing and evaluating the performance of the thin film in applications.In narrowband filter testing,common spectroradiometers have a certain divergence angle.This divergence angle causes the incident light not to be perpendicular,resulting in wavelength-angle shift errors.These errors manifest as a shift towards the shortwave direction of the center wavelength,a decrease in peak transmittance within the passband,an increase in bandwidth,and a decrease in the steepness of the transition zone.These factors can lead to measurement errors during narrowband filter testing.To address this issue,a high-precision spectral characterization and metrology system has been developed in this study.Methods By establishing a physical model of beam incidence,the divergence angle effect of beam incidence was analyzed,and the impact of angles on the center wavelength,peak transmittance,and full width at half maximum of narrowband filters was examined.A high-precision spectral characterization and metrology system(Fig.2)was set up using a laser beam with a small divergence angle as the light source.Furthermore,a comparison was conducted between the commonly used spectroradiometer test and the high-precision spectral characterization test system.Results and Discussions Through the preparation and testing of a 532 nm narrowband filter,the spectral performance of the commonly used spectroradiometer test shows a shift of the center wavelength towards the shortwave direction,a decrease in peak transmittance within the passband,and a widening of the bandwidth,with a decreasing trend in the steepness of the transition region(Fig.7).The high-precision spectral characterization test results in a center wavelength of 532 nm,a peak transmittance of 87.2%,and a full width at half maximum of 0.79 nm(Tab.2),which are closer to the theor

关 键 词：光学薄膜 窄带滤波器 光谱测试 高精度测试 

分 类 号：O484[理学—固体物理]