硅压阻式压力传感器耐冲击设计改进  

Improvement of Impact Resistance Design for Silicon Piezoresisitive Pressure Sensor

作　　者：王臻[1,2] 王伟 王言徐[1,2] 刘俊琴 WANG Zhen;WANG Wei;WANG Yanxu;LIU Junqin(Beijing Institute of Precision Mechatronics and Controls,Beijing 100076,China;Innovation Center for Control Actuators,Beijing 100076,China)

机构地区：[1]北京精密机电控制设备研究所,北京100076 [2]控制执行机构技术创新中心,北京100076

出　　处：《自动化与仪表》2024年第8期74-77,共4页Automation & Instrumentation

摘　　要：在液压伺服系统中,压力传感器是重要的测量器件,其中硅压阻式压力传感器应用最为广泛。由于压力传感器会遇到压力冲击的恶劣环境,强烈的压力冲击会造成压力敏感芯体的波纹膜片凹陷,甚至撕裂,最终导致传感器的失效。为了解决该问题,该文利用液压系统的阻尼原理,在压力传感器内增加了阻尼设计。利用AMESim软件对设计进行建模和仿真,并对改进后的传感器进行实际测试。结果表明,阻尼设计改进可以提高硅压阻式压力传感器的耐冲击性。In hydraulic servo systems,pressure sensor is important devices,silicon piezoresistive pressure sensors are widely used.Due to the pressure sensor encountering harsh environments of pressure shock.Strong pressure impact can cause the corrugated diaphragm of the pressure sensitive core to sink or even tear.In order to solve the problem,this paper use the damping principle of hydraulic systems,damping design has been added to the pressure sensor.Use AMESim to model and simulate the design,and conduct actual testing on he improved sensor.The results indicate that the improved damping design can enhance the impact resistance of silicon piezoresisitive pressure sensor.

关 键 词：硅压阻压力传感器 阻尼设计 仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]