集成PVB修饰Ag/AgCl参比电极的pH传感硅探针阵列  

pH sensing silicon array integrated PVB modified Ag/AgCl reference electrode

作　　者：王卓 刘景全[1] WANG Zhuo;LIU Jingquan(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200240

出　　处：《传感器与微系统》2024年第9期68-70,共3页Transducer and Microsystem Technologies

摘　　要：介绍了一种带有集成Ag/AgCl参比电极的硅记录探针,通过表面聚乙烯醇缩丁醛(PVB)的修饰实现稳定的pH传感,用于应用神经科学。集成参比电极通过恒流电化学镀法实现银层的制备以及氯化,滴涂的PVB主要用作参比电极的保护膜,参比电极面积为0.44 mm^(2)。最终硅记录探针的pH灵敏度为53.13 mV/pH,电位漂移为8 000 s下20 mV,并且探针工艺与硅基探针高度融合。总之,集成参比电极并且提高其稳定性对于生物传感器以及脑疾病诊断生物标志物的电化学检测具有重要意义。A silicon recording probe with an integrated Ag/AgCl reference electrode is introduced,which is used to achieve stable pH sensing by polyvinyl butyral(PVB)modification.Ultimately used in experiments in applied neurology.The integrated reference electrode realizes the preparation and chlorination of the silver layer by galvanostatic electrochemical plating.Drip coated PVB is mainly used as a protective film for reference electrodes.The area of reference electrode is 0.44mm^(2).Finally,the pH sensitivity of the silicon recording probe is 53.13mV/pH,and the potential drift at 8000s is 20 mV.The probe process is highly fused with the silicon-based probe.In conclusion,integrating reference electrodes and improving their stability are of great significance for biosensor and the electrochemical detection of diagnostic biomarkers for brain diseases.

关 键 词：Ag/AgCl参比电极 PH传感器 生物稳定性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]